Based on vibration of four side panels, a type of dual-rotor hybrid ultrasonic motor without using the torsional piezoelectric ceramics polarized along the circumferential direction is presented. The first longitudinal and the first bending vibration modes of the four side panels are used to indirectly excite the first longitudinal and the second torsional vibration modes of the stator cylinder. There are rectangle piezoelectric ceramics bonded on both sides of the four side panels, which are uniformly distributed along the circumference of the stator cylinder. One pair of panels on the opposite side is used to indirectly excite the first longitudinal vibration mode of the stator cylinder, and the other pair is used to indirectly excite the second torsional vibration mode. The simulation results, using finite element method software Workbench, reveal the operating principles, and the optimal structure is proposed. The appearance size of the prototype is 27.2 mm × 27.2 mm × 70 mm, while the outer diameter of the stator cylinder is 20 mm. The working frequency of the prototype measured in experiment is 44.7 KHz, which is consistent with the numerical results. According to the major mechanical measurement at 450 Vp−p operating voltage and 3.46 N preload, the stalling torque of the prototype is 8 mN·m and the no-load speed is 140 r/min. The experimental results indicate that the motor can operate in the first longitudinal and the second torsional coupled vibration modes transformed from the first longitudinal and the first bending vibration modes of four side panels.
Acoustic levitation of planar objects using a longitudinal vibration mode.
