Development of a Novel Mass Spectrometer Equipped with an Electron Cyclotron Resonance Ion Source

2007 ◽  
Vol 13 (4) ◽  
pp. 239-248 ◽  
Author(s):  
Masanori Kidera ◽  
Kazuya Takahashi ◽  
Shuichi Enomoto ◽  
Youhei Mitsubori ◽  
Akira Goto ◽  
...  

The ionization efficiency of an electron cyclotron resonance ion source (ECRIS) is generally high and all elements can be fundamentally ionized by the high-temperature plasma. We focused our attention on the high potentiality of ECRIS as an ion source for mass spectrometers and attempted to customize a mass spectrometer equipped with an ECRIS. Precise measurements were performed by using an ECRIS that was specialized and customized for elemental analysis. By using the charge-state distribution and the isotope ratio, the problem of overlap, such as that observed in the spectra of isobars, could be solved without any significant improvement in the mass resolution. When the isotope anomaly (or serious mass discrimination effect) was not observed in ECR plasma, the system was found to be very effective for isotope analysis. In this paper, based on the spectrum (ion current as a function of an analyzing magnet current) results of low charged state distributions (2+, 3+, 4+, …) of noble gases, we discuss the feasibility of an elemental analysis system employing an ECRIS, particularly for isotopic analysis. The high-performance isotopic analysis obtained from an ECRIS mass spectrometer in this study suggests that it can be widely applied to several fields of scientific study that require elemental or isotopic analyses with high sensitivity.

2007 ◽  
Vol 13 (5) ◽  
pp. 355-358 ◽  
Author(s):  
Masanori Kidera ◽  
Kazuya Takahashi ◽  
Shuichi Enomoto ◽  
Akira Goto ◽  
Yasushige Yano

We examined the fragmentation and ionization of molecules by low-temperature electrons generated by electron cyclotron resonance (ECR) plasma. We examined several types of metallocene compounds comprising a metal and 1,3-cyclopentadienes as ligands. We performed analyses using an ECR ion source (ECRIS) mass spectrometer. Consequently, we succeeded in ionizing fragments of an organometallic compound by adjusting the input power of the microwave introducing a super high-frequency plasma. Moreover, we succeeded in dynamically generating a significant quantity of fragment ions by continuously varying the input power. Information on the structure of a molecule may be acquired from this operation. Moreover, a molecule that could not be easily ionized thus far may now be ionizable when soft ionization is performed with this technique.


1991 ◽  
Vol 69 (3-4) ◽  
pp. 195-201 ◽  
Author(s):  
P. K. Shufflebotham ◽  
D. J. Thomson

This paper presents preliminary measurements of the spatial variation of the plasma density, electron temperature, plasma potential, and floating voltage within a divergent magnetic field electron cyclotron resonance (ECR) plasma processing reactor. The measurements are performed using an orbital-motion-limited cylindrical Langmuir probe designed specifically for use in these plasmas. A brief discussion of the stability and uniformity of divergent field plasmas in general, and qualitative techniques for the diagnosis of these properties, is also given. It was found that these plasmas generally occurred in distinct "modes," characterized by unique shapes and dependences on system variables, and between which discontinuous, noisy, and often bistable transitions occurred. Axially resolved probe measurements performed under ECR conditions showed that the plasma density exhibited a broadly peaked profile, while the electron temperature showed a sharp peak at ECR. The differences in these profiles leads to three qualitatively different plasma regions available for use in ECR processing. The variation of the plasma potential explains the origin of the axial ion beams that commonly occur in these systems.


1998 ◽  
Vol 69 (12) ◽  
pp. 4082-4085 ◽  
Author(s):  
P. Ludwig ◽  
F. Bourg ◽  
P. Briand ◽  
A. Girard ◽  
G. Melin ◽  
...  

2000 ◽  
Vol 71 (2) ◽  
pp. 1110-1112
Author(s):  
E. Tojyo ◽  
M. Oyaizu ◽  
S. C. Jeong ◽  
H. Ishiyama ◽  
Y. Ishida ◽  
...  

2015 ◽  
Vol 118 (9) ◽  
pp. 093301 ◽  
Author(s):  
V. Skalyga ◽  
I. Izotov ◽  
S. Golubev ◽  
A. Sidorov ◽  
S. Razin ◽  
...  

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