10112 Flow pattern visualization and measurement of water film flow on rotating wafer

2015 ◽  
Vol 2015.21 (0) ◽  
pp. _10112-1_-_10112-2_ ◽  
Author(s):  
Kenji AMAGAI ◽  
Yoshihiro KIYAMA ◽  
Akira FUKUNAGA ◽  
Hirokuni HIYAMA ◽  
Satomi HAMADA
1989 ◽  
Vol 32 (1) ◽  
pp. 46-52
Author(s):  
Ahmed Busnaina ◽  
Janice Edler ◽  
Glenn Gale ◽  
Frederick Kern

Particle removal using deionized clean water and centrifugal force (water rinsing) is an effective and commonly used method in the semiconductor industry. Understanding the flow field around the rotating waters is essential in determining the effectiveness and efficiency of the process. In this study, flow visualization is used to observe the jet trajectory and the flow pattern for different flow rates at different rotational speeds. The qualitative and quantitative results show that the rotating disk is completely covered with a water film only at certain values of the governing parameters. The second part of the study involves studying the shielding effect of the carrier on the flow pattern on the waters. The flow cannot be visualized or seen through the shielding. The flow pattern is therefore visualized with the aid of some chemicals (that react and leave a color pattern) on the surface of the water and in the water jet.


2013 ◽  
Author(s):  
Junpeng Shao ◽  
◽  
Chunxi Dai ◽  
Yanqin Zhang ◽  
Xiaodong Yu ◽  
...  

Author(s):  
Lingzi Wang ◽  
Jianmei Feng ◽  
Shijing Xu ◽  
Xiang Gao ◽  
Xueyuan Peng

The film flow behavior in an oil–gas cyclone separator was experimentally studied to improve the separation efficiency in terms of the effect of the oil film on the cylinder wall. The oil film flow pattern was captured using a high-speed camera, and the cylinder wall was divided into seven regions to analyze according to the different oil film flow patterns. Along the cyclone cylinder height, the central part of the cylinder was the main flow area, in which droplet–wall collisions and oil film splashing were severe. Additionally, the oil film’s distribution characteristics under inlet velocities of 14.0, 16.0, and 18.0 m/s were compared, and the results showed that more splashing oil droplets were generated under higher inlet velocity. Moreover, changing the structure of the central channel and outer cylinder slightly changed the oil film’s area and flow pattern but exhibited a weak effect on the oil film thickness and re-entrainment. Then, an improved structure was proposed by adding a porous cylinder to the outer cyclone to avoid the generation of small splashing droplets from the oil film. The performance of the modified separator was measured in a real oil-injected compressor system, which demonstrated higher separation efficiency with no increase in static pressure loss. The separation efficiency increased by up to 2.7%, while the pressure loss decreased by up to 10%. Thus, the improved structure can improve the performance of oil–gas separators by changing the distribution and thickness of the oil film on the cylinder wall.


2015 ◽  
Vol 64 ◽  
pp. 23-32 ◽  
Author(s):  
Anders Austegard ◽  
Mayukh Bandopadhyay ◽  
Sigurd Weidemann Løvseth ◽  
Amy Brunsvold

2012 ◽  
Vol 11 (2) ◽  
pp. 117
Author(s):  
PRIYO HERU ADIWIBOWO

Multi-phase flows are widely encountered in several engineering and industrial facilities, such as conventional steam power  plants, evaporators and condensers, pressurized-water nuclear reactors, a wide variety of petroleum industries, chemicals and  food processing industries. Surely, in the complex pipeline  installation of these systems, vertical pipe will be commonly  used for pipe connection. The purpose of this work is to investigate the flow pattern of gas-liquid two phase in the vertical pipe. Experiments will be performed in a 36 mm ID  acrylic pipe vertical. Superifical liquid velocities and volumetric gas quality will be varied 0.3~1,1 m/s and 0.05~0.2 respectively. Digital camera will be used for flow pattern  visualization in the vertical pipe. It was observed that effect of vertical pipe on flow pattern formed cluster bubbly flow for low volumetric gas quality with high superifical liquid velocities. For  superifical liquid velocities with medium volumetric gas quality formed homogeneous bubbly flow and high volumetric gas quality is dense bubbly flow.


2005 ◽  
Vol 89 (6) ◽  
pp. 719-732 ◽  
Author(s):  
Mehul S. Vesvikar ◽  
Muthanna Al-Dahhan

2018 ◽  
Vol 58 (2) ◽  
pp. 1075-1086 ◽  
Author(s):  
Enrique A. López-Guajardo ◽  
Gabriela M. Garza-Cantú ◽  
André Marques-Camarena ◽  
Enrique Ortiz-Nadal ◽  
Krishna D.P. Nigam ◽  
...  

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