K42 Study on thickness measurement method of slurry layer betWeen Polishing pad and wafer in CMP process

2011 ◽  
Vol 2011.64 (0) ◽  
pp. 413-414
Author(s):  
Yasushi YAMANE ◽  
Keiichi Kimura ◽  
Keisuke SUZUKI ◽  
Panart KHAJORNRUNGRUANG
Keyword(s):  
Measurement Method ◽  
Thickness Measurement ◽  
Polishing Pad ◽  
Slurry Layer

Block Thickness Measurement of Using the Structured Light Vision

2018 ◽  
Vol 33 (01) ◽  
pp. 1955001 ◽  
Author(s):  
Fenghui Lian ◽  
Qingchang Tan ◽  
Siyuan Liu
Keyword(s):  
Machine Vision ◽  
Measurement Method ◽  
Measurement Accuracy ◽  
Thickness Measurement ◽  
Base Plane ◽  
Vision Measurement ◽  
Measurement Results ◽  
Measurement Equations ◽  
Structured Light Vision ◽  
Measuring Base

A method for measuring block thicknesses is proposed by the machine vision measurement. Equations of the measuring base plane and the light plane are formed by calibration. Then, the equation of the light strip image, that is, the image of the intersection between the base plane and light one, is established by the projection relation. Equation of the image of the light strip on the measured plane can be determined by the fitting. Since the light strip on the measuring base plane is parallel to one on the measured plane, the thickness of the measuring block is measured by using the two equations. The experiment evaluates the measurement accuracy of the measurement method and analyzes the influence of some factors on the measurement results.

Autonomous Underwater Vehicle “BOSS-A” for Acoustic and Visual Survey of Manganese Crusts

2016 ◽  
Vol 28 (1) ◽  
pp. 91-94 ◽  
Author(s):  
Yuya Nishida ◽  
◽  
Kenji Nagahashi ◽  
Takumi Sato ◽  
Adrian Bodenmann ◽  
...  
Keyword(s):  
Measurement Method ◽  
Autonomous Underwater Vehicle ◽  
Underwater Vehicle ◽  
Thickness Measurement ◽  
The State ◽  
Constant Speed ◽  
Visual Survey ◽  
Acoustic Instruments ◽  
Manganese Crust ◽  
Visual Instrument

[abstFig src='/00280001/10.jpg' width=""300"" text='Autonomous underwater vehicle BOSS-A' ]In order to effectively investigate the distribution and amount of cobalt-rich manganese crust (CRC), an autonomous underwater vehicle BOSS-A equipped with visual and acoustic instruments were developed. BOSS-A observes the seafloor along preset waypoints at a constant speed and altitude. Detailed 3D seafloor images can be obtained from the visual instrument, which employs a sheet laser and a camera. In addition, an acoustic instrument measures the CRC thickness beneath BOSS-A. The CRC at Katayama seamount was surveyed in February. The results visually presented the state and distribution of the CRC in this site and clarified the amount of the CRC. In the future, the authors will develop a more reliable thickness measurement method.

An ultrasonic measurement method for full range of oil film thickness

2018 ◽  
Vol 233 (3) ◽  
pp. 481-489 ◽  
Author(s):  
Kai Zhang ◽  
Pan Dou ◽  
Tonghai Wu ◽  
Kai Feng ◽  
Youquan Zhu
Keyword(s):  
Reflection Coefficient ◽  
Film Thickness ◽  
Measurement Method ◽  
Ultrasonic Method ◽  
Dead Zone ◽  
Full Range ◽  
Thickness Measurement ◽  
Ultrasonic Measurement ◽  
Center Frequency ◽  
Oil Film

Ultrasonic method is quite promising for oil film thickness measurement in industry, while there is normally a dead zone for one ultrasonic sensor with a special center frequency when measuring the oil film thickness by the traditional reflection coefficient amplitude. In this paper, an ultrasonic measurement method for full range of oil film thickness was investigated. The theoretical relationship between the oil film thickness and the reflection coefficient phase was firstly built up and the reflection coefficient phase was found to be able to measure the oil film thickness in the dead zone. Then the reflection coefficient amplitude and phase were combined to measure the oil film thickness in the full range. A high-precision calibrated rig, which could form a series of known film thicknesses oil layers, was set up and the performance of this method was shown to work well. This method is significant for online oil film thickness monitoring in industry.

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