Heat transfer and fluid flow on heated disc during impinging jet flow of simulated source material of chemical vapor deposition

2019 ◽  
Vol 2019 (0) ◽  
pp. 0118
Author(s):  
Yuhei Kawasaki ◽  
Misaki Honda ◽  
Humika Sato ◽  
Ken-Ichiro Tanoue
Keyword(s):  
Heat Transfer ◽  
Fluid Flow ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Impinging Jet ◽  
Jet Flow ◽  
Source Material ◽  
Heated Disc ◽  
Simulated Source

Role of heat transfer and fluid flow in the chemical vapor deposition of diamond

1990 ◽  
Vol 68 (5) ◽  
pp. 2424-2432 ◽  
Author(s):  
T. DebRoy ◽  
K. Tankala ◽  
W. A. Yarbrough ◽  
R. Messier
Keyword(s):  
Heat Transfer ◽  
Fluid Flow ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor

scholarly journals 2D MODELLING OF SILICON CHEMICAL VAPOR DEPOSITION IN AN IMPINGING JET REACTOR

1991 ◽  
Vol 02 (C2) ◽  
pp. C2-39-C2-46
Author(s):  
Y. WANG ◽  
C. CHAUSSAVOINE ◽  
F. TEYSSANDIER
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Impinging Jet ◽  
2D Modelling
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