scholarly journals Anisotropy Detection in Small Area of Materials using Surface Acoustic Waves. Basic Research on Utilization of Ultrasonic Reflectivity Measurement for Estimating Elastic Anisotropy.

1995 ◽  
Vol 61 (584) ◽  
pp. 769-776
Author(s):  
Ikuo Ihara ◽  
Tatsuhiko Aizawa ◽  
Hideo Koguchi ◽  
Junji Kihara
2016 ◽  
Vol 109 (15) ◽  
pp. 151906 ◽  
Author(s):  
R. A. Duncan ◽  
F. Hofmann ◽  
A. Vega-Flick ◽  
J. K. Eliason ◽  
A. A. Maznev ◽  
...  

2004 ◽  
Vol 812 ◽  
Author(s):  
A.A. Maznev ◽  
A. Mazurenko ◽  
G. Alper ◽  
C.J.L. Moore ◽  
M. Gostein ◽  
...  

AbstractA non-contact optical technique based on laser-generated surface acoustic waves (SAWs) was used to characterize elastic properties of two types of thin (150-1100 nm) low-k films: more traditional non-porous organosilicate glass PECVD films (k=3.0) and novel mesoporous silica films fabricated in supercritical CO2 (k=2.2). The acoustic response of the non-porous samples is well described by a model of an elastically isotropic material with two elastic constants, Young's modulus and Poisson's ratio. Both parameters can be determined by analyzing SAW dispersion curves. However, the isotropic model fails to describe the SAW dispersion in the mesoporous samples. Modifying the model to allow a difference between in-plane and out-of plane properties (i.e., a transversely isotropic material) results in good agreement between the measurements and the model. The in-plane compressional modulus is found to be 2-3 times larger than the out-of plane modulus, possibly due to the anisotropic shape of the pores. Elastic anisotropy should therefore be taken into account in modeling mechanical behavior of low-k materials.


Author(s):  
Kemining W. Yeh ◽  
Richard S. Muller ◽  
Wei-Kuo Wu ◽  
Jack Washburn

Considerable and continuing interest has been shown in the thin film transducer fabrication for surface acoustic waves (SAW) in the past few years. Due to the high degree of miniaturization, compatibility with silicon integrated circuit technology, simplicity and ease of design, this new technology has played an important role in the design of new devices for communications and signal processing. Among the commonly used piezoelectric thin films, ZnO generally yields superior electromechanical properties and is expected to play a leading role in the development of SAW devices.


1998 ◽  
Vol 77 (5) ◽  
pp. 1195-1202
Author(s):  
Andreas Knabchen Yehoshua, B. Levinson, Ora

2014 ◽  
Author(s):  
Jean-Charles Beugnot ◽  
Sylvie Lebrun ◽  
Gilles Pauliat ◽  
Vincent Laude ◽  
Thibaut Sylvestre

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