scholarly journals Molecular Dynamics Analysis for Effect of Defect Size on Fracture Behavior of Single Crystal Silicon

2006 ◽  
Vol 72 (720) ◽  
pp. 1131-1136
Author(s):  
Tomoyuki FUJII ◽  
Yoshiaki AKINIWA
Keyword(s):  
Molecular Dynamics ◽  
Single Crystal ◽  
Fracture Behavior ◽  
Single Crystal Silicon ◽  
Defect Size ◽  
Dynamics Analysis ◽  
Crystal Silicon

scholarly journals Fracture behavior of single crystal silicon with thermal oxide layer

2016 ◽  
Vol 163 ◽  
pp. 523-532 ◽  
Author(s):  
Toshiyuki Tsuchiya ◽  
Kenji Miyamoto ◽  
Koji Sugano ◽  
Osamu Tabata
Keyword(s):  
Single Crystal ◽  
Oxide Layer ◽  
Fracture Behavior ◽  
Single Crystal Silicon ◽  
Crystal Silicon ◽  
Thermal Oxide

scholarly journals 21318 Evaluation of Fracture behavior and Fracture Toughness on Single Crystal Silicon Wafers

2009 ◽  
Vol 2009.15 (0) ◽  
pp. 537-538
Author(s):  
Hiroshi NAKAMURA ◽  
Masayoshi MIYASAKA ◽  
Ryota YANAGIDA ◽  
Masayoshi TATENO
Keyword(s):  
Fracture Toughness ◽  
Single Crystal ◽  
Fracture Behavior ◽  
Single Crystal Silicon ◽  
Silicon Wafers ◽  
Crystal Silicon
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