Vectorial pupil optimization for compensating polarization effect at full exposure field in lithography

2021 ◽  
Author(s):  
Yanqiu Li ◽  
Miao Yuan ◽  
Guanghui Liao ◽  
Yiyu Sun ◽  
Pengzhi Wei ◽  
...  
2003 ◽  
Vol 38 (4) ◽  
pp. 332-343 ◽  
Author(s):  
Anatoly I. TASKAEV ◽  
Edward R. LANDA ◽  
Denis V. GURYEV ◽  
Natalia GOLOVKO BUTLER ◽  
Thomas F. KRAEMER

Energies ◽  
2021 ◽  
Vol 14 (3) ◽  
pp. 746
Author(s):  
Jianfeng Lu ◽  
Senfeng Yang ◽  
Gechuanqi Pan ◽  
Jing Ding ◽  
Shule Liu ◽  
...  

Molten chloride salt is recognized as a promising heat transfer and storage medium in concentrating solar power in recent years, but there is a serious lack for thermal property data of molten chloride salts. In this work, local structures and thermal properties for molten chloride salt—including NaCl, MgCl2, and ZnCl2—were precisely simulated by Born–Mayer–Huggins (BMH) potential in a rigid ion model (RIM) and a polarizable ion model (PIM). Compared with experimental data, distances between cations, densities, and heat capacities of molten chloride slats calculated from PIM agree remarkably better than those from RIM. The polarization effect brings an extra contribution to screen large repulsive Coulombic interaction of cation–cation, and then it makes shorter distance between cations, larger density and lower heat capacity. For NaCl, MgCl2, and ZnCl2, PIM simulation deviations of distances between cations are respectively 3.8%, 3.7%, and 0.3%. The deviations of density and heat capacity for NaCl between PIM simulation and experiments are only 0.6% and 2.2%, and those for MgCl2 and ZnCl2 are 0.7–10.7%. As the temperature rises, the distance between cations increases and the structure turns into loose state, so the density and thermal conductivity decrease, while the ionic self-diffusion coefficient increases, which also agree well with the experimental results.


2002 ◽  
Vol 66 (3) ◽  
Author(s):  
Kenichi Ishikawa ◽  
Hiroyuki Kawano ◽  
Katsumi Midorikawa

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