Qualitative and quantitative analysis of an additive element in metal oxide nanometer film using laser induced breakdown spectroscopy

2018 ◽  
Vol 57 (3) ◽  
pp. 404 ◽  
Author(s):  
Junshan Xiu ◽  
Shiming Liu ◽  
Meiling Sun ◽  
Lili Dong
Keyword(s):  
Quantitative Analysis ◽  
Metal Oxide ◽  
Laser Induced Breakdown Spectroscopy ◽  
Qualitative And Quantitative Analysis ◽  
Qualitative And Quantitative ◽  
Breakdown Spectroscopy ◽  
Laser Induced Breakdown

Calibration-free quantitative analysis of thin-film oxide layers in semiconductors using laser induced breakdown spectroscopy (LIBS)

2017 ◽  
Vol 32 (7) ◽  
pp. 1378-1387 ◽  
Author(s):  
Seyyed Ali Davari ◽  
Sheng Hu ◽  
Ravi Pamu ◽  
Dibyendu Mukherjee
Keyword(s):  
Thin Film ◽  
Quantitative Analysis ◽  
Metal Oxide ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Laser Induced Breakdown Spectroscopy ◽  
Oxide Layers ◽  
Breakdown Spectroscopy ◽  
Laser Induced Breakdown ◽  
Calibration Free

Calibration-free LIBS for quantitative analysis of thin film layers for metal oxide semiconductor (MOS) applications.

A NOVEL STRATEGY FOR DIRECT ELEMENTAL DETERMINATION USING LASER-INDUCED BREAKDOWN SPECTROSCOPY: FLUENCE CALIBRATION

2021 ◽  
Author(s):  
Raquel C Machado ◽  
Diego Victor Babos ◽  
Daniel Fernandes Andrade ◽  
Edenir Rodrigues Pereira-Filho
Keyword(s):  
Quantitative Analysis ◽  
Matrix Effects ◽  
Calibration Method ◽  
Laser Induced Breakdown Spectroscopy ◽  
Breakdown Spectroscopy ◽  
Elemental Determination ◽  
Laser Induced Breakdown ◽  
Direct Solid Analysis ◽  
Novel Strategy ◽  
Direct Solid

Quantitative analysis requires several efforts to obtain an adequate calibration method to overcome matrix effects employing direct solid analysis by laser-induced breakdown spectroscopy (LIBS). To this end, in this study,...

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