Atmospheric- and low-pressure inductively coupled plasma as an ion source for a mass

2003 ◽  
Vol 70 (1) ◽  
pp. 51
Author(s):  
M. A. Kartasheva ◽  
M. N. Maleshin ◽  
G. N. Gerasimov ◽  
V. I. Danilenkov
Keyword(s):  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Ion Source ◽  
Inductively Coupled

scholarly journals PLASMA ASSISTED CONVERSION OF CARBON DIOXIDE IN LOW-PRESSURE GAS DISCHARGES

2019 ◽  
pp. 141-146
Author(s):  
S.V. Dudin ◽  
A.V. Zykov ◽  
S.D. Yakovin
Keyword(s):  
Carbon Dioxide ◽  
Inductively Coupled Plasma ◽  
Plasma Source ◽  
Low Pressure ◽  
Ion Source ◽  
Anode Layer ◽  
Magnetron Discharge ◽  
Gas Discharges ◽  
Inductively Coupled ◽  
High Conversion Rate

Experimental results of comparative study of carbon dioxide conversion efficiency to CO and O2 in the plasmas of different low-pressure discharges are presented. Inductively coupled plasma source, magnetron discharge and anode layer discharge in Hall-type ion source were used in CO2 pressure range 0.5…3 mTorr. It is shown that the best combination of high conversion rate with significant energy efficiency of the conversion is demonstrated by the ICP source.

Low-Pressure Inductively Coupled Plasma Ion Source for Molecular and Atomic Mass Spectrometry

1994 ◽  
Vol 66 (20) ◽  
pp. 3400-3407 ◽  
Author(s):  
E. Hywel. Evans ◽  
Warren. Pretorius ◽  
Les. Ebdon ◽  
Steve. Rowland
Keyword(s):  
Mass Spectrometry ◽  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Ion Source ◽  
Atomic Mass ◽  
Inductively Coupled ◽  
Plasma Ion Source ◽  
Atomic Mass Spectrometry

Global model and diagnostic of a low-pressure SF6/Ar inductively coupled plasma

2009 ◽  
Vol 18 (2) ◽  
pp. 025001 ◽  
Author(s):  
L Lallement ◽  
A Rhallabi ◽  
C Cardinaud ◽  
M C Peignon-Fernandez ◽  
L L Alves
Keyword(s):  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Global Model ◽  
Inductively Coupled
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