Fourier transform approach for the estimation of optical thin film thickness

Author(s):  
Pierre Verly

2019 ◽  
Vol 682 ◽  
pp. 109-120 ◽  
Author(s):  
Wjatscheslaw Sakiew ◽  
Stefan Schrameyer ◽  
Marco Jupé ◽  
Philippe Schwerdtner ◽  
Nick Erhart ◽  
...  




1996 ◽  
Vol 11 (2) ◽  
pp. 114-116 ◽  
Author(s):  
D. T. Brower ◽  
R. E. Revay ◽  
T. C. Huang

The determination of thin film thickness by four X-ray reflectivity methods (namely, the peak separation, the Fourier transform, the modified Bragg equation, and the curve-fitting methods) has been studied. An analysis of SrS and BaF2 thin films showed thickness values determined by the methods agreed to within 4%. The curve-fitting method had the highest accuracy but was time-consuming. The peak separation, the Fourier transform, and the modified Bragg equation methods are considerably faster and, on average, gave 2.8%, 0.9%, and 0.2% larger thicknesses than those of the curve-fitting method.



Vacuum ◽  
1981 ◽  
Vol 31 (2) ◽  
pp. 113-115 ◽  
Author(s):  
V.T. Chitnis ◽  
P.N. Puntambekar






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Jiayue Han ◽  
Xingwei Han ◽  
Jun Gou ◽  
Ming Yang ◽  
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2020 ◽  
Vol 102 (21) ◽  
Author(s):  
Stephan Geprägs ◽  
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...  


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