Influence of ion beam parameters onto two-dimensional optical thin film thickness distributions deposited by ion beam sputtering
Keyword(s):
Ion Beam
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2002 ◽
Vol 11
(3-6)
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pp. 896-900
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2000 ◽
Vol 71
(2)
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pp. 996-998
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2010 ◽
Vol 57
(5B)
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pp. 1197-1199
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