Applications of Microstructured Silicon Wafers as Internal Reflection Elements in Attenuated Total Reflection Fourier Transform Infrared Spectroscopy

2010 ◽  
Vol 64 (9) ◽  
pp. 1022-1027 ◽  
Author(s):  
Henrik Schumacher ◽  
Ulrich Künzelmann ◽  
Boris Vasilev ◽  
Klaus-Jochen Eichhorn ◽  
Johann W. Bartha
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