Some Characteristics of the Hollow Cathode Discharge Source from Hollow Cathodes of Different Sizes and Shapes

1995 ◽  
Vol 49 (11) ◽  
pp. 1705-1714 ◽  
Author(s):  
J. C. Williams ◽  
Jan-Yurn Kung ◽  
Yixin Chen ◽  
Xiangjun Cai ◽  
Steven T. Griffin

The empirical evaluation of several types of two-piece hollow cathodes for the analysis of microsamples using both dc and pulsed discharge modes of the hollow cathode discharge is reported. The discharge parameters used are similar to those that have given good precision and sensitivity for microsamples in this laboratory. Both optical microscopy and scanning electron microscopy were used to follow sputtering effects on the cathode geometry. The sputtering patterns in the flat-bottom, two-piece cylindrical hollow cathode revealed directly the cathode dark space on the cathode cavity bottom. The temporal emission profiles from the spherical cathode cavity are similar to those observed in cylindrical cathode cavities. The temporal emission profile changes with the diameter of the cylindrical cathode cavity and is characteristic of the analyte.

The article presents the results of experimental studies of a glow discharge with a hollow cathode in helium and argon gases using an auxiliary discharge as an electron emitter. The authors proposed to make the electrode common for both discharges in the form of a cylindrical metal mesh. The advantage of this design is explained as follows. The connection between the discharges is carried out through holes in the grid with a geometric transparency of 0.2, which makes it possible not only to smoothly control the glow discharge current, but also to enhance the discharge current. Plasma is known to be one of the most efficient electron emitters; however, its use as a cathode in devices with a glow discharge at low gas pressures is complicated by the fact that a grid with small holes is required to separate the electron flow from the plasma, and it is impractical to use such a system in view of low mechanical strength of the grid Since the hollow cathode works effectively at low gas pressures, the release of an electron flux from the plasma of some auxiliary discharge is possible with much larger holes in the grid separating the plasma and the hollow cathode cavity. In this case, the grid can be made such that it can withstand sufficiently high thermal loads and can operate in typical discharge modes with a hollow cathode. The injection of electrons into the cathode cavity of the glow discharge changes the radial distribution of the glow intensity, the width of the cathode dark space, and other parameters of the plasma in the cathode cavity. The influence of electrons penetrating from the auxiliary discharge into the cathode cavity of the main discharge becomes significant when the current of these electrons is comparable to or exceeds the current of electrons leaving the grid cathode surface as a result of γ-processes. In parallel with the measurement of the optical and electrical characteristics of the hollow cathode glow discharge plasma, measurements of the electron concentration were carried out by the microwave sounding method. The entire current of the auxiliary discharge penetrates into the cavity of the main discharge; however, after acceleration in the cathode dark space, the electrons penetrating from the auxiliary discharge ionize gas atoms and noticeably increase the current of the main discharge. Additional ions formed due to the ionization of the gas by the injected electrons knock out new electrons from the cathode surface, which makes it possible to increase the discharge current.


1993 ◽  
Vol 47 (10) ◽  
pp. 1567-1570 ◽  
Author(s):  
P. D. Mixon ◽  
S. T. Griffin ◽  
J. C. Williams

Paschen curves are presented for hollow cathodes with diameters varying from 5 mm to 1.5 mm. The curves obey similar functions of ( pd), where p is the argon gas pressure and d is the hollow diameter. The curves exhibit similar properties in terms of the location of the breakdown voltage minima. The breakdown voltage increases monotonically for decreasing hollow diameter. The shapes of the various curves and the ( pd) minima location are unaffected by aspect ratio.


1993 ◽  
Vol 48 (3) ◽  
pp. 457-464 ◽  
Author(s):  
Z. Donkó

Abstract The motion of high-energy electrons was studied in a helium hollow cathode discharge using Monte Carlo simulation. The calculations were carried out in the pressure range of 2-10 mbar. The length of the cathode dark space (CDS) was determined by simulation in an iterative way using experimental voltage-current density characteristics of the discharge. At the lowest helium pressure (2 mbar) the concentration of high-energy electrons was found to be the same at the CDS-negative glow boundary and at the midplane of the discharge while at 8 mbars it was found to be by 1-2 orders of magnitude smaller. The results of our calculations support the existence of "oscillating" electrons. The probability of 1, 2 and 3 transfers through the negative glow (NG) for primary electrons was found to be 37%, 11 % and 2%, respectively, at 2 mbar pressure. The spatial distribution of ionizations and the angular distribution of electron velocity at the CDS-NG boundary were also investigated. The pressure dependence of the current balance at the cathode was obtained, and the results indicate that with decreasing pressure other secondary emission processes than ion impact become important in the maintenance of the discharge.


1972 ◽  
Vol 27 (12) ◽  
pp. 1812-1820 ◽  
Author(s):  
H Helm

AbstractThe energy of electrons crossing the glow boundary of a cylindrical hollow cathode discharge has been directly controlled in a small, test region by the use of a wall probe installed in the side of the cathode cylinder. Varying the potential of this probe disclosed that some electrons ejected from the probe surface and hence from all cathode walls penetrate into the dark space opposite to the surface of their origin. These electrons can reach the opposite wall if the pressure and the cathode diameter are too low, in which case they will be removed. This removal causes the hollow cathode discharge to extinguish at higher pressures than is the case for linear discharges. Electrons that cross the cathode cavity entirely can pass through a small hole in the cathode wall into a high vacuum chamber and be analysed energetically. The same experiment also discloses the energy distribution of electrons leaving the cathode surface. A comparison with the theory recently published 3 shows that pendelelectrons can be responsible for the currrent amplification observed in the hollow cathode discharge.


1987 ◽  
Vol 41 (4) ◽  
pp. 567-572 ◽  
Author(s):  
Shigehiko Fujimaki ◽  
Yukio Adachi ◽  
Chiaki Hirose

Optogalvanic observation of the Stark shift of the Kr 8d[3/2]20-5p[3/2]2 atomic line has been carried out on a Kr hollow cathode discharge in a discharge tube with a cylindrical cathode, at a fill pressure of 1 to 6 Torr (1 Torr = 133.322 Pa), and a discharge current from 1 to 10 mA, to reveal the linear decrease of electric field with radial distance from the cathode surface. Values of current density, charge density, and other discharge parameters have been derived and their behavior has been compared with theoretical formula; it is concluded that a major role is played by the photons from the negative-glow region. Unusual features observed in the discharge at 1 Torr pressure and above 5 mA of current have been attributed to the effect of Penning ionization of sputtered copper atoms.


2020 ◽  
Vol 60 (1) ◽  
pp. 015501
Author(s):  
Shoki Abe ◽  
Katsuyuki Takahashi ◽  
Seiji Mukaigawa ◽  
Koichi Takaki ◽  
Ken Yukimura

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