scholarly journals Characterization of 1D Grating Standard for National Laboratory Comparison Using Scanning Electron Microscope

Instrumentasi ◽  
2019 ◽  
Vol 42 (2) ◽  
pp. 101
Author(s):  
Asep Ridwan Nugraha ◽  
Ardi Rahman ◽  
Beni Adi Trisna
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
National Laboratory ◽  
1D Grating ◽  
Scanning Electron

Characterization of Sputtered Films using the Scanning Electron Microscope

1973 ◽  
Vol 31 ◽  
pp. 44-45
Author(s):  
R. F. Schneidmiller ◽  
W. F. Thrower ◽  
C. Ang
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Sputtered Films ◽  
Plasma Sputtering ◽  
Microelectronic Devices ◽  
Control Film ◽  
Scanning Electron

Solid state materials in the form of thin films have found increasing structural and electronic applications. Among the multitude of thin film deposition techniques, the radio frequency induced plasma sputtering has gained considerable utilization in recent years through advances in equipment design and process improvement, as well as the discovery of the versatility of the process to control film properties. In our laboratory we have used the scanning electron microscope extensively in the direct and indirect characterization of sputtered films for correlation with their physical and electrical properties.Scanning electron microscopy is a powerful tool for the examination of surfaces of solids and for the failure analysis of structural components and microelectronic devices.

Characterization of a nano line width reference material based on metrological scanning electron microscope

2021 ◽  
Author(s):  
Fang Wang ◽  
Yushu Shi ◽  
Wei Li ◽  
Xiao Deng ◽  
Xinbin Cheng ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Reference Material ◽  
Scanning Electron Microscope ◽  
Line Width ◽  
Scanning Electron

In situ scanning electron microscope electrical characterization of GaN nanowire nanodiodes using tungsten and tungsten/gallium nanoprobes

2009 ◽  
Vol 149 (39-40) ◽  
pp. 1608-1610 ◽  
Author(s):  
Yong Lin ◽  
Qiming Li ◽  
Andrew Armstrong ◽  
George T. Wang
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Electrical Characterization ◽  
Gan Nanowire ◽  
Scanning Electron ◽  
And Tungsten

Morphological Characterization of Fabricated Aluminum Interdigitated Electrodes on Silicon Substrate

2015 ◽  
Vol 1109 ◽  
pp. 381-384
Author(s):  
M. Safwan Azmi ◽  
Sharipah Nadzirah ◽  
Uda Hashim
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Silicon Substrate ◽  
Morphological Characterization ◽  
Interdigitated Electrodes ◽  
Photolithography Process ◽  
Scanning Electron

The purpose of this paper is to study the morphological characterization of aluminum interdigitated electrodes (IDE) of different gap sizes on silicon substrate. The electrodes were fabricated using standard photolithography process and were done so with sizes of 12 μm, 10 μm and 7 μm. The electrodes were morphologically characterized using scanning electron microscope (SEM) and high-powered microscope (HPM).Keywords: morphological, interdigitated electrodes, aluminum

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