Morphological Characterization of Fabricated Aluminum Interdigitated Electrodes on Silicon Substrate
2015 ◽
Vol 1109
◽
pp. 381-384
Keyword(s):
The purpose of this paper is to study the morphological characterization of aluminum interdigitated electrodes (IDE) of different gap sizes on silicon substrate. The electrodes were fabricated using standard photolithography process and were done so with sizes of 12 μm, 10 μm and 7 μm. The electrodes were morphologically characterized using scanning electron microscope (SEM) and high-powered microscope (HPM).Keywords: morphological, interdigitated electrodes, aluminum
2012 ◽
Vol 2012
◽
pp. 1-6
◽
2017 ◽
Vol 5
(6)
◽
pp. 1348-1355
1973 ◽
Vol 31
◽
pp. 44-45
2018 ◽
Vol 4
(6)
◽
pp. 301-312
2000 ◽
2009 ◽
Vol 149
(39-40)
◽
pp. 1608-1610
◽