Tetrahedral amorphous carbon (ta-C) films were deposited onto Si(100) wafers by using
filtered cathodic vacuum arc technique (FCVA). The influence of the negative bias voltage applied to
substrates on film structures was studied by Raman spectroscopy, X-ray photoemission spectroscopy
(XPS). The ta-C films showed maximal sp3 fractions 87%, the hardness and elastic modulus of the ta-C
film is 72 and 480 GPa, respectively. In vitro measurements of contact angle and platelet adhesion were
applied to evaluate the biocompatibility of the ta-C films in comparison with that of NiTi, 316L and pure
titanium. The results show that the ta-C films have hydrophobicity and exhibit better hemocompatibility
which are very suitable for biomedical applications.
