Nano-bridge testing method for mechanical characterization of individual nanotubes and nanowires

2005 ◽  
Author(s):  
Yong Wang
Author(s):  
Zhiqiang Cao ◽  
Tong-Yi Zhang ◽  
Xin Zhang

Plasma-enhanced chemical vapor deposited (PECVD) silane-based oxides (SiOx) have been widely used in both microelectronics and MEMS (MicroElectroMechanical Systems) to form electrical and/or mechanical components. In this paper, a novel nanoindentation-based microbridge testing method is developed to measure both the residual stresses and Young’s modulus of PECVD SiOx films on silicon wafers. Theoretically, we considered both the substrate deformation and residual stress in the thin film and derived a closed formula of deflection versus load. The formula fitted the experimental curves almost perfectly, from which the residual stresses and Young’s modulus of the film were determined. Experimentally, freestanding microbridges made of PECVD SiOx films were fabricated using the silicon undercut bulk micromachining technique. The results showed that the as-deposited PECVD SiOx films had a residual stress of −155±17 MPa and a Young’s modulus of 74.8±3.3 GPa.


2021 ◽  
Vol 4 (s1) ◽  
Author(s):  
Andrea T. Lugas ◽  
Gianpaolo Serino ◽  
Mara Terzini ◽  
Cristina Bignardi ◽  
Alberto L. Audenino

Two biaxial mechanical test methods were devised to compare their suitability for the mechanical characterization of soft biological tissues with the least possible tissue waste. Nanoindentation was used to explore the microscopic properties of the tissue and to overcome the macroscopic test limitations.


2018 ◽  
Author(s):  
Devon Jakob ◽  
Le Wang ◽  
Haomin Wang ◽  
Xiaoji Xu

<p>In situ measurements of the chemical compositions and mechanical properties of kerogen help understand the formation, transformation, and utilization of organic matter in the oil shale at the nanoscale. However, the optical diffraction limit prevents attainment of nanoscale resolution using conventional spectroscopy and microscopy. Here, we utilize peak force infrared (PFIR) microscopy for multimodal characterization of kerogen in oil shale. The PFIR provides correlative infrared imaging, mechanical mapping, and broadband infrared spectroscopy capability with 6 nm spatial resolution. We observed nanoscale heterogeneity in the chemical composition, aromaticity, and maturity of the kerogens from oil shales from Eagle Ford shale play in Texas. The kerogen aromaticity positively correlates with the local mechanical moduli of the surrounding inorganic matrix, manifesting the Le Chatelier’s principle. In situ spectro-mechanical characterization of oil shale will yield valuable insight for geochemical and geomechanical modeling on the origin and transformation of kerogen in the oil shale.</p>


2017 ◽  
Vol 5 (3) ◽  
pp. 8
Author(s):  
KUMAR DINESH ◽  
KAUR ARSHDEEP ◽  
AGGARWAL YUGAM KUMAR ◽  
UNIYAL PIYUSH ◽  
KUMAR NAVIN ◽  
...  

Author(s):  
Alexandre Luiz Pereira ◽  
Rafael Oliveira Santos ◽  
DOINA BANEA ◽  
Álisson Lemos

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