Atomistic simulations of ultra-short pulse laser ablation of aluminum: validity of the Lambert-Beer law

2018 ◽  
Vol 7 (3) ◽  
pp. 189-196
Author(s):  
Eugen Eisfeld ◽  
Johannes Roth

Abstract Based on hybrid molecular dynamics/two-temperature simulations, we study the validity of the application of Lambert-Beer’s law, which is conveniently used in various modeling approaches of ultra-short pulse laser ablation of metals. The method is compared to a more rigorous treatment, which involves solving the Helmholtz wave equation for different pulse durations ranging from 100 fs to 5 ps and a wavelength of 800 nm. Our simulations show a growing agreement with increasing pulse durations, and we provide appropriate optical parameters for all investigated pulse durations.

Author(s):  
F. Beaudoin ◽  
P. Perdu ◽  
C. DeNardi ◽  
R. Desplats ◽  
J. Lopez ◽  
...  

Abstract Ultra-short pulse laser ablation is applied to IC backside sample preparation. It is contact-less, non-thermal, precise and can ablate the various types of material present in IC packages. This study concerns the optimization of ultra-short pulse laser ablation for silicon thinning. Uncontrolled silicon roughness and poor uniformity of the laser thinned cavity needed to be tackled. Special care is taken to minimize the silicon RMS roughness to less than 1µm. Application to sample preparation of 256Mbit devices is presented.


2010 ◽  
Vol 101 (1) ◽  
pp. 97-101 ◽  
Author(s):  
Jeppe Byskov-Nielsen ◽  
Juha-Matti Savolainen ◽  
Martin Snogdahl Christensen ◽  
Peter Balling

Carbon ◽  
2018 ◽  
Vol 138 ◽  
pp. 234-242 ◽  
Author(s):  
Maximilian Spellauge ◽  
Florin-Cristian Loghin ◽  
Jürgen Sotrop ◽  
Matthias Domke ◽  
Marco Bobinger ◽  
...  

Procedia CIRP ◽  
2019 ◽  
Vol 81 ◽  
pp. 270-275 ◽  
Author(s):  
Andreas Kacaras ◽  
Matthias Bächle ◽  
Markus Schwabe ◽  
Frederik Zanger ◽  
Fernando Puente León ◽  
...  

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