Investigations on Integrated Optical Interference Couplers in PMMA for Visible and Infrared Range Fabricated by “Direct Writing” Excimer Laser Radiation

Optical waveguides were generated in Polymethylmethacrylate using “direct” laser and contact mask structuring. Excimer laser radiation (248 nm) produced a local refractive index increase thereby achieving light guiding in waveguides with widths from 2 to 15 $\mu$m. The near field output images were analyzed using visible and infrared laser light. The mode fields of single mode structures were evaluated to elaborate numerically the parameters of the index profile. An index increase up to 0.01 could be achieved using laser pulses at fluences below $0.15$ ${\textrm{J/cm}^{2}}$. Thus it was possible to design interference couplers of 5 $\mu$m waveguides width for the visible (635 nm to 670 nm) as well as for the infrared range at 1550 nm. The coupling properties as a function of the waveguide separation and the wavelength is investigated and found compatible with numerical simulations for the structure design. The presented approach allows for designing and fabricating single mode couplers in an efficient and simple manner.