Physical Chemistry of Hydrogenous Species in the Si-Si02 System
1995 ◽
Vol 50
(7)
◽
pp. 653-665
◽
Keyword(s):
Research on hydrogenous species in the Si-Si02 system is reviewed and examined. Some aspects of thermal silica on silicon are explained by comparison with crystalline quartz or bulk amorphous fused silica. Hydrogen behavior in the Si-Si02 system is complicated by the unique features of device processing technology, an electrified interface, and high electric fields. An electrochemical model of the negative-bias-field-induced degradation of the system is used as a starting point for discussion of diffusion and solubility, atomic H disposition, thermochemical phenomena, and radiation damage. It is thereby hoped to provide new approaches for complete modeling of hydrogen physical chemistry in the Si-Si02 system.
1969 ◽
Vol 24
(5)
◽
pp. 851-852
◽
1986 ◽
Vol 44
◽
pp. 758-761
2020 ◽
Vol 92
(2)
◽
pp. 20401
Keyword(s):
1990 ◽
Vol 25
(2)
◽
pp. 359-362
◽
2009 ◽
Vol 113
(39)
◽
pp. 17045-17058
◽
2000 ◽
Vol 33
(19)
◽
pp. 2379-2387
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