Studies of thermal stability of a-C:H:Si coatings produced by radio-frequency plasma assisted chemical vapour deposition (RF-PACVD) method

2016 ◽  
Vol 1 (4) ◽  
pp. 32-37
Author(s):  
Damian Batory
Keyword(s):  
Thermal Stability ◽  
Radio Frequency ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Thermal Stability Of

Effect of pre-deposited carbon layer on the formation of carbon nitride nanostructures prepared by radio-frequency plasma enhanced chemical vapour deposition

2011 ◽  
Vol 130 (1-2) ◽  
pp. 218-222 ◽  
Author(s):  
Noor Hamizah Khanis ◽  
Richard Ritikos ◽  
Maisara Othman ◽  
Nur Maisarah Abdul Rashid ◽  
Siti Meriam Ab Gani ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Chemical Vapour Deposition ◽  
Carbon Nitride ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Carbon Layer ◽  
Radio Frequency Plasma ◽  
Frequency Plasma
Sign in / Sign up

Export Citation Format

Share Document