Use of scanning electron microscopy combined with focused ion beam (FIB-SEM) in the evaluation of functional sol-gel derived titanium dioxide Zastosowanie skaningowego mikroskopu elektronowego ze skupioną wiązką jonów w ocenie funkcjonalnych powłok ditlenku tytanu

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Jakub Grzesiak
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Hiroaki Matsumoto ◽  
Miki Tsuchiya ◽  
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Uda Hashim

Titania or titanium dioxide (TiO2) thin film has been synthesized via sol-gel method with monoethanolamine (MEA) as a catalyst. The mixing of titanium butoxide as a precursor, ethanol as a solvent and MEA were stirred using magnetic stirrer under ambient temperature [. The TiO2solution prepared then was deposited on SiO2substrates using spin-coater and the coated films were annealed at 600°C. Finally, both before and after annealed TiO2thin films were characterized using Field Emission Scanning Electron Microscopy (FESEM). The obtained results show the different TiO2particles formation before and after annealed.


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