Buckling Control of Silicon Dioxide Diaphragms for Sensitivity Enhancement of Piezoelectric Ultrasonic Microsensors
2011 ◽
Vol 131
(7)
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pp. 235-239
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2011 ◽
Vol 131
(4)
◽
pp. 141-147
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Keyword(s):
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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2019 ◽
Vol 23
(3)
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pp. 283-290
Keyword(s):
2003 ◽
Vol 32
(5)
◽
pp. 211-218
2020 ◽
Vol 51
(2)
◽
pp. 195-208
Keyword(s):