Sputter Deposition of YSZ Epitaxial Buffer Layer at Wafer Level for Piezoelectric MEMS Utilizing PZT-based Monocrystalline Thin Film
2016 ◽
Vol 136
(10)
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pp. 437-442
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2018 ◽
Vol 676
(1)
◽
pp. 131-140
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Keyword(s):