A review of ion bombardment effects during the growth of thin film semiconductors by sputter deposition
2012 ◽
Vol 76
(5)
◽
pp. 355-358
◽
Keyword(s):
2014 ◽
Vol 78
(3)
◽
pp. 132-136
◽
2016 ◽
Vol 136
(10)
◽
pp. 437-442
◽
2009 ◽
Vol 631-632
◽
pp. 327-331
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1979 ◽
Vol 16
(2)
◽
pp. 321-323
◽
1996 ◽
2000 ◽
Vol 170
(3-4)
◽
pp. 375-384
◽
Keyword(s):
2000 ◽
2003 ◽
Vol 427
(1-2)
◽
pp. 127-132
◽
1995 ◽
Vol 74-75
◽
pp. 469-473
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