Ion beam mixing, diffusion, and phase stability in Cu/Al2O3 interfaces

Ion beam mixing, diffusion properties, and phase stability have been investigated in Cu/Al2O3 bilayer samples. Specimens were prepared by vapor deposition and irradiated with 150 keV Ar+ ions up to a fluence of 1.5 · 1017 Ar+/cm2. Sample temperature under irradiation was varied between 77 K and 673 K. The mixing behavior was studied by analyzing the concentration depth profiles, determined by Rutherford Backscattering Spectroscopy. It was found that mixing efficiencies of Cu, Al, and O scale with Ar+ fluence. Radiation enhanced diffusion (RED), observed above room temperature, is separated from ballistic mixing and high temperature diffusion. The migration enthalpy for interdiffusion in the RED region (between RT and 300 °C) was estimated to be approximately 0.3 eV. Sputtering yields depending on temperature gradient near to sample and phase stability versus ion dose and temperature are also discussed.

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Ar+ Induced Interfacial Mixinc in the Pd/Cu Bilayer System

MRS Proceedings ◽

10.1557/proc-157-227 ◽

1989 ◽

Vol 157 ◽

Cited By ~ 1

Author(s):

H.K. Kim ◽

J.H. Song ◽

S.K. Kim ◽

K. Jeong ◽

C.N. Whang ◽

...

Keyword(s):

Room Temperature ◽

Ion Beam ◽

Layer By Layer ◽

Ion Beam Mixing ◽

Enhanced Diffusion ◽

Bilayer System ◽

Radiation Enhanced Diffusion

ABSTRACTIon beam mixing of a Pd/Cu bilayer is studied using irradiation with 80 keV Ar+ ions at room temperature. RBS analysis shows that intermixing has occurred across the Pd/Cu interface, and that the mixing amount increases with increasing ion dose, which agrees well with a model for radiation enhanced diffusion. It is found that the Cu3Pd phase grows in a layer-by-layer manner.

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Bombardment-Induced Mixing of Mo Films on Si

MRS Proceedings ◽

10.1557/proc-54-221 ◽

1985 ◽

Vol 54 ◽

Cited By ~ 1

Author(s):

AH. Van Ommen ◽

M.F.C. Willemsen ◽

PR. Boudewijn ◽

A. H. Reader

Keyword(s):

Elevated Temperature ◽

Layer Thickness ◽

Mixed Layer ◽

Room Temperature ◽

Ion Beam ◽

Ion Beam Mixing ◽

Dominant Mechanism ◽

Enhanced Diffusion ◽

Implantation Temperature ◽

Radiation Enhanced Diffusion

ABSTRACTWe studied ion beam mixing of thin Mo films on monocrystalline Si by As “implantation at room temperature. The results differ significantly from those obtained for implantation at elevated temperature (T > 200°C). where ion beam mixing results in hexagonal MoSi2 formation. Room temperature implantation results in the formation of an amorphous mixed layer. The composition of this layer varies with depth from Mo-rich to Si-rich. The mixed layer thickness increases linearly with implanted dose and energy. An increase of the implantation temperature with 100°C gives rise to a factor of 2 larger mixed layer thickness and to the formation of amorphous MoSi2 near the interface with Si. These phenomena indicate that at elevated temperature ion beam mixing is controlled by radiation-enhanced diffusion whereas, at room temperature ballistic mixing is the dominant mechanism.

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Ion beam mixing and radiation-enhanced diffusion in metallic glasses

Journal of the Less Common Metals ◽

10.1016/0022-5088(88)90387-6 ◽

1988 ◽

Vol 140 ◽

pp. 267-275 ◽

Cited By ~ 5

Author(s):

R.S. Averback ◽

H. Hahn ◽

Fu-Rong Ding

Keyword(s):

Metallic Glasses ◽

Ion Beam ◽

Ion Beam Mixing ◽

Enhanced Diffusion ◽

Radiation Enhanced Diffusion

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Critical temperatures for radiation enhanced diffusion and metastable alloy formation in ion beam mixing

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(91)95441-f ◽

1991 ◽

Vol 53 (1) ◽

pp. 24-34 ◽

Cited By ~ 26

Author(s):

R. de Reus ◽

A.M. Vredenberg ◽

A.C. Voorrips ◽

H.C. Tissink ◽

F.W. Saris

Keyword(s):

Ion Beam ◽

Alloy Formation ◽

Critical Temperatures ◽

Ion Beam Mixing ◽

Enhanced Diffusion ◽

Radiation Enhanced Diffusion ◽

Metastable Alloy

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Ion-Beam Mixing in Amorphous and Crystalline Fe-Ti

MRS Proceedings ◽

10.1557/proc-128-213 ◽

1988 ◽

Vol 128 ◽

Author(s):

Udo Scheuer ◽

Lynn E. Rehn ◽

Pete Baldo

Keyword(s):

Amorphous Materials ◽

Ion Beam ◽

Ion Beam Mixing ◽

Rutherford Back Scattering ◽

Enhanced Diffusion ◽

Voltage Electron ◽

Radiation Enhanced Diffusion ◽

Bcc Phase ◽

Ti Films

ABSTRACTCrystalline Fe and Fe-10at.%Ti and amorphous Fe-37at.%Ti films with Ag and Hf markers were produced by vapor deposition. Marker spreading during ion-beam mixing between 77 K and 580 K was measured using Rutherford Back-scattering (RBS). Marker spreading was also measured between temperatures of 300 K to 700 K after full crystallization of the Fe-37at.%Ti films. Microstructural changes during ion-beam mixing were studied in situ, in a High-Voltage Electron Microscope. Homogeneous nucleation of a metastable bcc phase, was observed at high temperatures. The results are discussed in terms of their relevance to “radiation-enhanced” diffusion in amorphous materials.

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Solid-state amorphization, interdiffusion, and ion-beam mixing in Au/Zr and Ni/Zr

Journal of Materials Research ◽

10.1557/jmr.1989.1444 ◽

1989 ◽

Vol 4 (6) ◽

pp. 1444-1449 ◽

Cited By ~ 20

Author(s):

Fu-Rong Ding ◽

P. R. Okamoto ◽

L. E. Rehn

Keyword(s):

Solid State ◽

Ion Beam ◽

X Ray Diffraction ◽

Temperature Dependent ◽

Ion Beam Mixing ◽

Enhanced Diffusion ◽

Bilayer Films ◽

Voltage Electron ◽

Radiation Enhanced Diffusion

Inert-gas markers, Rutherford backscattering, and x-ray diffraction were used to investigate solid-state interdiffusion in Ni/Zr and Au/Zr bilayer films as a function of temperature; microstructural studies during annealing were performed in situ, in a high-voltage electron microscope. Au, in contrast to Ni, is not an anomalously fast diffuser in crystalline Zr. Nevertheless, an amorphous product phase was found in both alloy systems for reaction temperatures  550 K; heterogeneous nucleation of the amorphous phase was observed in Au/Zr. The interdiffusion data reveal two distinct Arrhenius regimes, 330–∼470 K and ∼480–550 K, with quite different apparent activation enthalpies. These thermal interdiffusion results are compared with temperature dependent studies of ion-beam mixing in similar bilayer specimens. This comparison indicates that the enhanced efficiencies observed for ion-beam mixing above ∼480 K result from the as-prepared metastable microstructurc, and are not due to radiation-enhanced diffusion.

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High Energy Ion Beam Mixing in Al2 O3

MRS Proceedings ◽

10.1557/proc-27-771 ◽

1983 ◽

Vol 27 ◽

Author(s):

M. B. Lewis ◽

C. J. Mchargue

Keyword(s):

Elevated Temperatures ◽

Ion Beam ◽

High Energy ◽

Binary Collision ◽

Surface Layers ◽

Ion Beam Mixing ◽

Enhanced Diffusion ◽

Depth Profiles ◽

Metal Atoms ◽

Radiation Enhanced Diffusion

ABSTRACTThe ion beam mixing technique has been employed to mix metal atoms into the surface layers of Al2O3. Ion beams of Fe+ and Zr+ in the 1 to 4 MeV energy range were used to irradiate Al2O3 specimens on the surfaces of which films of chromium or zirconium had been evaporated. Some specimens were irradiated at elevated temperatures of 873 or 1173 K. Rutherford backscattering (RBS) and channeling methods were used to measure the metal atom depth profiles near the surface. Analyses of the backscattering data included binary collision calculations using the codes TRIM and MARLOWE. The significance and limitations of high energy (>1 MeV) beams for ion beam mixing experiments is discussed. Evidence was found for radiation enhanced diffusion and/or solubility of zirconium and chromium in Al2O3 at 873 K.

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Ion beam mixing and radiation enhanced diffusion in metal/ceramic interfaces

Ion Beam Modification of Materials ◽

10.1016/b978-0-444-82334-2.50111-8 ◽

1996 ◽

pp. 589-596

Author(s):

K. Neubeck ◽

C.-E. Lefaucheur ◽

H. Hahn ◽

A.G. Balogh ◽

H. Baumann ◽

...

Keyword(s):

Ion Beam ◽

Ion Beam Mixing ◽

Enhanced Diffusion ◽

Radiation Enhanced Diffusion ◽

Metal Ceramic ◽

Ceramic Interfaces

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Ion Beam Mixing In Binary Amorphous Metallic Alloys

MRS Proceedings ◽

10.1557/proc-51-491 ◽

1985 ◽

Vol 51 ◽

Cited By ~ 2

Author(s):

Horst Hahn ◽

R. S. Averback ◽

T. Diaz De La Rubia ◽

P. R. Okamoto

Keyword(s):

Low Temperatures ◽

Glass Phase ◽

Ion Beam ◽

Metallic Alloys ◽

Strong Temperature Dependence ◽

Ion Beam Mixing ◽

Amorphous Metallic Alloys ◽

Enhanced Diffusion ◽

Radiation Enhanced Diffusion ◽

Diffusion Mechanisms

ABSTRACTIon beam mixing (IM) was measured in homogeneous amorphous metallic alloys of Cu-Er and Ni-Ti as a function of temperature using tracer impurities, i.e., the so called “marker geometry”. In Cu-Er, a strong temperature dependence in IM was observed between 80 K and 373 K, indicating that radiation-enhanced diffusion mechanisms are operative in this metallic glass. Phase separation of the Cu-Er alloy was also observed under irradiation as Er segregated to the vacuum and SiO2 interfaces of the specimen. At low-temperatures, the amount of mixing in amorphous Ni-Ti is similar to that in pure Ni or Ti, but it is much greater in Cu-Er than in either Cu or Er.

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Energy Dependence of Compound Growth in Au-Al and Cu-Al Bilayer Systems During Ion Beam Mixing

MRS Proceedings ◽

10.1557/proc-27-97 ◽

1983 ◽

Vol 27 ◽

Author(s):

S.U. Campisano ◽

Chu Techang ◽

S. Cannavo ' ◽

E. Rimini

Keyword(s):

Beam Energy ◽

Ion Beam ◽

Ion Beam Mixing ◽

Energy Density Distribution ◽

Enhanced Diffusion ◽

Radiation Enhanced Diffusion ◽

Deposited Energy ◽

Al Thin Film ◽

New Phase ◽

Proper Account

ABSTRACTThe kineticsof phase formation and growth in Au-Al and Cu-Al thin film bilayers under ion beam bombardment was investigated in detail for the dependence on the beam energy. The experimental data can be interpreted within the radiation enhanced diffusion description, taking into proper account the target configuration, the growth of a new phase and the deposited energy density distribution.

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