Experimental and theoretical characterization of the surface acoustic wave propagation properties of GaN epitaxial layers on c-plane sapphire
2003 ◽
Vol 18
(5)
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pp. 1157-1161
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Keyword(s):
Surface acoustic wave (SAW) propagation properties of gallium nitride (GaN) epitaxial layers on sapphire were theoretically and experimentally characterized. GaN thin films were grown on a c-plane sapphire substrate using a metalorganic chemical vapor deposition system. The experimental characterization of SAW propagation properties was performed with a linear array of interdigital transducer structures, while SAW velocities were calculated by matrix methods. Experimentally, we found pseudo-SAW and high-velocity pseudo-SAW modes in the GaN/sapphire structure, which had a good agreement with calculated velocities.
2016 ◽
Vol 16
(10)
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pp. 10219-10224
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2000 ◽
Vol 18
(4)
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pp. 1993-1997
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Keyword(s):
2009 ◽
Vol 56
(11)
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pp. 2559-2564
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Keyword(s):