Moisture uptake and dielectric property of methylsilsesquioxane/high-temperature porogen hybrids and porous low-k films
2011 ◽
Vol 26
(23)
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pp. 2987-2995
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Abstract
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2019 ◽
Vol 34
(15)
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pp. 2573-2581
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Keyword(s):
1975 ◽
Vol 42
(3)
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pp. 437-444
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2018 ◽
Vol 33
(3)
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pp. 360-371
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Keyword(s):
2018 ◽
Vol 33
(12)
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pp. 1814-1821
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Keyword(s):