Electrically controllable position-controlled color centers created in SiC pn junction diode by proton beam writing

2018 ◽  
Vol 33 (20) ◽  
pp. 3355-3361 ◽  
Author(s):  
Yuichi Yamazaki ◽  
Yoji Chiba ◽  
Takahiro Makino ◽  
Shin-Ichiro Sato ◽  
Naoto Yamada ◽  
...  
Keyword(s):  
Proton Beam ◽  
Color Centers ◽  
Proton Beam Writing ◽  
Pn Junction ◽  
Junction Diode ◽  
Image Position

Abstract

Creation of Color Centers in SiC PN Diodes Using Proton Beam Writing

2019 ◽  
Vol 963 ◽  
pp. 709-713
Author(s):  
Yoji Chiba ◽  
Yuichi Yamazaki ◽  
Takahiro Makino ◽  
Shinichiro Sato ◽  
Naoto Yamada ◽  
...  
Keyword(s):  
Magnetic Resonance ◽  
Proton Beam ◽  
Room Temperature ◽  
Color Centers ◽  
Silicon Vacancy ◽  
Proton Beam Writing ◽  
Pn Junction ◽  
Optically Detected Magnetic Resonance ◽  
Junction Diode ◽  
Optically Detected

We demonstrated that silicon vacancy (VSi) can be created in SiC pn junction diode by proton beam writing (PBW) without degradation of the diode performance. The VSi showed the same specific emission for both optically and electrically excitation, which suggests that electrically controllable VSi was created. In addition, optically detected magnetic resonance (ODMR) signal was successfully detected from optically excited VSi at room temperature. This result suggests that VSi introduced into the device by PBW still maintain spin manipulating capability, which is an important step toward realizing SiC devices internally equipped with a VSi-based quantum sensor.

Development of ion sources: Towards high brightness for proton beam writing applications

2015 ◽  
Vol 348 ◽  
pp. 23-28 ◽  
Author(s):  
Nannan Liu ◽  
P. Santhana Raman ◽  
Xinxin Xu ◽  
Huei Ming Tan ◽  
Anjam Khursheed ◽  
...  
Keyword(s):  
Proton Beam ◽  
Ion Sources ◽  
High Brightness ◽  
Proton Beam Writing

Fabrication of micro-optical components in polymer using proton beam writing

2004 ◽  
Author(s):  
Andrew A. Bettiol ◽  
Kambiz Ansari ◽  
Tze Chien Sum ◽  
Jeroen A. van Kan ◽  
Frank Watt
Keyword(s):  
Proton Beam ◽  
Optical Components ◽  
Proton Beam Writing

The second generation Singapore high resolution proton beam writing facility

2012 ◽  
Vol 83 (2) ◽  
pp. 02B902 ◽  
Author(s):  
J. A. van Kan ◽  
P. Malar ◽  
Armin Baysic de Vera
Keyword(s):  
High Resolution ◽  
Proton Beam ◽  
Second Generation ◽  
Proton Beam Writing
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