Closed-loop control of a laser assisted carbon nanotube growth process for interconnects in flexible electronics

2011 ◽  
Vol 1365 ◽  
Author(s):  
Yoeri van de Burgt ◽  
Yves Bellouard ◽  
Rajesh Mandamparambil ◽  
Andreas Dietzel
Keyword(s):  
Carbon Nanotube ◽  
Flexible Electronics ◽  
Iron Catalyst ◽  
Chemical Vapor ◽  
Catalyst Layer ◽  
Deposition Process ◽  
Loop Control ◽  
Aluminum Oxide Layer ◽  
Carbon Nanotube Forests ◽  
Carbon Nanotube Growth

ABSTRACTA feedback control mechanism based on infrared radiation monitoring coupled with reflectivity information was developed to control the temperature of a laser assisted chemical vapor deposition process for the growth of carbon nanotube forests. An infrared laser operating at 808 nm is focused on a silicon substrate containing a 20 nm-aluminum-oxide layer and a 1.5 nm-iron catalyst layer. The growth takes place in an argon/ hydrogen/ ethylene gaseous environment. SEM and Raman spectroscopy analysis show that good controllability and reproducibility is achieved over multiple experiments.

scholarly journals Structure transformation by sp2 hydrocarbon assisted carbon nanotube growth

RSC Advances ◽  
2018 ◽  
Vol 8 (45) ◽  
pp. 25815-25818 ◽  
Author(s):  
Sook Young Moon ◽  
Woo Sik Kim ◽  
Chung Soo Kim
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanotube ◽  
Species Composition ◽  
Vapor Deposition ◽  
Iron Catalyst ◽  
Chemical Vapor ◽  
Structure Transformation ◽  
Carbon Nanotube Growth ◽  
Nanotube Growth

In this study, we investigated the effect of hydrocarbon species composition on carbon nanotube (CNT) growth using an iron catalyst by chemical vapor deposition.

Plasma Enhanced Chemical Vapor Deposition Time Effect on Multi-Wall Carbon Nanotube Growth Using C2H2 and H2 as Precursors

2014 ◽  
Vol 938 ◽  
pp. 58-62 ◽  
Author(s):  
Yusoff Noriah ◽  
Nor Hayati Saad ◽  
Mohsen Nabipoor ◽  
Suraya Sulaiman ◽  
Daniel Bien Chia Sheng
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanotube ◽  
Vapor Deposition ◽  
Cobalt Catalyst ◽  
Deposition Time ◽  
Chemical Vapor ◽  
Catalyst Layer ◽  
Carbon Nanotube Growth ◽  
Nanotube Growth ◽  
Multi Wall Carbon Nanotube

Multi-wall carbon nanotube (MWCNT) structures were grown on cobalt catalyst layer through Plasma Enhanced Chemical Vapor Deposition (PECVD) process. Acetylene (C2H2) and hydrogen (H2) are used as precursors during the PECVD process. The morphology structures of the MWCNTs grown under different PECVD time were investigated and characterized using Scanning Electron Microscope (SEM). The effect of the PECVD time on the MWCNT growth is studied by varying the PECVD time at 45 sec and 600 sec. The morphology structures suggest that the growth rate is proportional to the PECVD time under the similar setting condition of pressure, acetylene flow-rate and temperature.

scholarly journals An interdigitated electrode with dense carbon nanotube forests on conductive supports for electrochemical biosensors

The Analyst ◽  
2018 ◽  
Vol 143 (15) ◽  
pp. 3635-3642 ◽  
Author(s):  
Hisashi Sugime ◽  
Takuya Ushiyama ◽  
Keita Nishimura ◽  
Yutaka Ohno ◽  
Suguru Noda
Keyword(s):  
Carbon Nanotube ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Deposition Process ◽  
Electrochemical Biosensors ◽  
Interdigitated Electrode ◽  
Highly Sensitive ◽  
Vertically Aligned ◽  
Carbon Nanotube Forests

A highly sensitive interdigitated electrode (IDE) with vertically aligned dense carbon nanotube forests directly grown on conductive supports was demonstrated by combining UV lithography and a low temperature chemical vapor deposition process (470 °C).

scholarly journals Influence of Ni Catalyst Layer and TiN Diffusion Barrier on Carbon Nanotube Growth Rate

2010 ◽  
Vol 5 (3) ◽  
pp. 539-544 ◽  
Author(s):  
Jean-Baptiste A. Kpetsu ◽  
Pawel Jedrzejowski ◽  
Claude Côté ◽  
Andranik Sarkissian ◽  
Philippe Mérel ◽  
...  
Keyword(s):  
Growth Rate ◽  
Carbon Nanotube ◽  
Diffusion Barrier ◽  
Catalyst Layer ◽  
Ni Catalyst ◽  
Carbon Nanotube Growth ◽  
Nanotube Growth ◽  
Tin Diffusion Barrier

Synthesis of Unique Structures of Carbon Nanotube at Anodic Aluminum Oxide Template

2013 ◽  
Vol 421 ◽  
pp. 319-323
Author(s):  
Jafar Khan Kasi ◽  
Ajab Khan Kasi ◽  
Muzamil Bokhari ◽  
Nitin Afzulpurkar
Keyword(s):  
Carbon Nanotube ◽  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Iron Catalyst ◽  
Chemical Vapor ◽  
Anodic Aluminum Oxide Template ◽  
Multiwall Carbon Nanotube ◽  
Anodic Aluminum ◽  
Carbon Structures ◽  
Potential Applications

Carbon nanotube (CNT) is one of the most attractive nanomaterials which may be used in many potential applications of nanotechnology due to its excellent mechanical, electrical and thermal properties. We demonstrated the fabrication of carbon nanotube at the surface of anodic aluminum oxide (AAO) membrane by chemical vapor deposition (CVD) method. Acetylene was used as a hydrocarbon source and Fe as catalyst. CNT was synthesized at different temperature. The iron catalyst was confined in the holes of the AAO membrane. A variety of carbon structures such as nanotubes, helices, spiral, and hook-like curved shapes in the range of micrometer were synthesized. High graphitic multiwall carbon nanotube (MWCNT) was found at 700-750°C temperature.

scholarly journals Origin of periodic rippling during chemical vapor deposition growth of carbon nanotube forests

Carbon ◽  
2011 ◽  
Vol 49 (15) ◽  
pp. 4972-4981 ◽  
Author(s):  
P. Vinten ◽  
J. Bond ◽  
P. Marshall ◽  
J. Lefebvre ◽  
P. Finnie
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanotube ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Chemical Vapor Deposition Growth ◽  
Carbon Nanotube Forests
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