Channel Strain Characterization in Semiconductor Device by Techniques Based on Transmission Electron Microscope

2011 ◽  
Vol 1349 ◽  
Author(s):  
Jinghong Li ◽  
Jeff Johnson ◽  
Dureseti Chidambarrao ◽  
Yunyu Wang ◽  
Anthony G. Domenicucci
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Computer Aided Design ◽  
Semiconductor Device ◽  
Stress Measurement ◽  
Strain Characterization ◽  
Transmission Electron ◽  
Strain Stress ◽  
Convergent Beam ◽  
Aided Design

ABSTRACTThree techniques based on transmission electron microscope (TEM) have been successfully applied to measure strain/stress in the channel area of PMOS semiconductor devices with embedded SiGe in the source/drain areas: convergent beam electron diffraction (CBED), nano beam diffraction (NBD) and dark-filed holography (DFH). Consistent channel strain measurements from the three techniques on the same TEM sample (eSiGe PMOS with 17%Ge) were obtained. Reliable strain/stress measurement results in the channel area have been achieved with very good agreement with computer-aided design (TCAD) calculations.

Measurement of lattice parameter at the nanometer scale using convergent-beam microdiffraction from a thermal emission source

1993 ◽  
Vol 51 ◽  
pp. 690-691
Author(s):  
W. T. Pike
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Thermal Emission ◽  
Lattice Parameter ◽  
Scanning Transmission Electron Microscope ◽  
Emission Source ◽  
Device Structure ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Convergent Beam

With the advent of crystal growth techniques which enable device structure control at the atomic level has arrived a need to determine the crystal structure at a commensurate scale. In particular, in epitaxial lattice mismatched multilayers, it is of prime importance to know the lattice parameter, and hence strain, in individual layers in order to explain the novel electronic behavior of such structures. In this work higher order Laue zone (holz) lines in the convergent beam microdiffraction patterns from a thermal emission transmission electron microscope (TEM) have been used to measure lattice parameters to an accuracy of a few parts in a thousand from nanometer areas of material.Although the use of CBM to measure strain using a dedicated field emission scanning transmission electron microscope has already been demonstrated, the recording of the diffraction pattern at the required resolution involves specialized instrumentation. In this work, a Topcon 002B TEM with a thermal emission source with condenser-objective (CO) electron optics is used.

Using the TEM Condenser Lens to Switch between Image and Diffraction Modes

2013 ◽  
Vol 21 (2) ◽  
pp. 40-40
Author(s):  
Lydia Rivaud
Keyword(s):  
Electron Microscope ◽  
Diffraction Pattern ◽  
Transmission Electron Microscope ◽  
Condenser Lens ◽  
Selected Area Diffraction Pattern ◽  
Transmission Electron ◽  
Set Up ◽  
Convergent Beam ◽  
Beam Diffraction ◽  
Convergent Beam Diffraction

Central to the operation of the transmission electron microscope (TEM) (when used with crystalline samples) is the ability to go back and forth between an image and a diffraction pattern. Although it is quite simple to go from the image to a convergent-beam diffraction pattern or from an image to a selected-area diffraction pattern (and back), I have found it useful to be able to go between image and diffraction pattern even more quickly. In the method described, once the microscope is set up, it is possible to go from image to diffraction pattern and back by turning just one knob. This makes many operations on the microscope much more convenient. It should be made clear that, in this method, neither the image nor the diffraction pattern is “ideal” (details below), but both are good enough for many necessary procedures.

Automated Grain Mapping Using Wide Angle Convergent Beam Electron Diffraction in Transmission Electron Microscope for Nanomaterials

2011 ◽  
Vol 17 (6) ◽  
pp. 859-865 ◽  
Author(s):  
Vineet Kumar
Keyword(s):  
Grain Size ◽  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Visual Inspection ◽  
Mapping Method ◽  
Wide Angle ◽  
Inspection Method ◽  
Automated Method ◽  
Transmission Electron ◽  
Convergent Beam

AbstractThe grain size statistics, commonly derived from the grain map of a material sample, are important microstructure characteristics that greatly influence its properties. The grain map for nanomaterials is usually obtained manually by visual inspection of the transmission electron microscope (TEM) micrographs because automated methods do not perform satisfactorily. While the visual inspection method provides reliable results, it is a labor intensive process and is often prone to human errors. In this article, an automated grain mapping method is developed using TEM diffraction patterns. The presented method uses wide angle convergent beam diffraction in the TEM. The automated technique was applied on a platinum thin film sample to obtain the grain map and subsequently derive grain size statistics from it. The grain size statistics obtained with the automated method were found in good agreement with the visual inspection method.

Convergent-Beam Diffraction in the Characterization of Crystalline Phases

1985 ◽  
Vol 62 ◽  
Author(s):  
J. A. Eades ◽  
M. J. Kaufman ◽  
H. L. Fraser
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Zone Axis ◽  
Crystalline Materials ◽  
Powerful Technique ◽  
Transmission Electron ◽  
Convergent Beam ◽  
Beam Diffraction ◽  
Convergent Beam Diffraction

ABSTRACTConvergent-beam diffraction in the transmission electron microscope is a powerful technique for the characterization of crystalline materials. Examples are presented to show the way in which convergent-beam zone-axis patterns can be used to determine: the unit cell; the symmetry; the strain of a crystal. The patterns are also recognizable and so can be used, like fingerprints, to identify phases.

One of my Failures: Diffraction in the TEM

2011 ◽  
Vol 19 (1) ◽  
pp. 72-72 ◽  
Author(s):  
Alwyn Eades
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Standard Method ◽  
Transmission Electron ◽  
Diffraction Patterns ◽  
Convergent Beam ◽  
Beam Diffraction ◽  
Convergent Beam Diffraction

There are two principal techniques for obtaining diffraction patterns in the transmission electron microscope (TEM). They are selected-area diffraction (SAD) and convergent-beam diffraction (CBED). CBED is quicker and easier to use, and it provides a much richer characterization of the sample. Thus, it is clear that CBED should be used in the vast majority of cases. It should be the diffraction technique that students learn first, and students should be taught to consider it the standard method of doing diffraction in the TEM.

A Reproducible Selective Stain for Cardiac Sarcoplasmic Reticulum

1974 ◽  
Vol 32 ◽  
pp. 214-215
Author(s):  
R. A. Waugh ◽  
J. R. Sommer
Keyword(s):  
Complex System ◽  
Electron Microscope ◽  
Sarcoplasmic Reticulum ◽  
Transmission Electron Microscope ◽  
Electron Microscopic ◽  
Cardiac Sarcoplasmic Reticulum ◽  
Transmission Electron

Cardiac sarcoplasmic reticulum (SR) is a complex system of intracellular tubules that, due to their small size and juxtaposition to such electron-dense structures as mitochondria and myofibrils, are often inconspicuous in conventionally prepared electron microscopic material. This study reports a method with which the SR is selectively “stained” which facilitates visualizationwith the transmission electron microscope.

Surface Structure of the Spores of Glugea Weissenbergi

1969 ◽  
Vol 27 ◽  
pp. 238-239
Author(s):  
Sanford H. Vernick ◽  
Anastasios Tousimis ◽  
Victor Sprague
Keyword(s):  
Electron Microscope ◽  
Surface Structure ◽  
Transmission Electron Microscope ◽  
Mature Spore ◽  
Spore Surface ◽  
Sectioned Material ◽  
Transmission Electron ◽  
Surface Detail

Recent electron microscope studies have greatly expanded our knowledge of the structure of the Microsporida, particularly of the developing and mature spore. Since these studies involved mainly sectioned material, they have revealed much internal detail of the spores but relatively little surface detail. This report concerns observations on the spore surface by means of the transmission electron microscope.

A New High Resolution Transmission Electron Microscope with Second-Zone Objective Lens

1969 ◽  
Vol 27 ◽  
pp. 176-177 ◽  
Author(s):  
H. Tochigi ◽  
H. Uchida ◽  
S. Shirai ◽  
K. Akashi ◽  
D. J. Evins ◽  
...  
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
Transmission Electron Microscope ◽  
Objective Lens ◽  
High Excitation ◽  
Transmission Electron ◽  
New Instrument

A New High Excitation Objective Lens (Second-Zone Objective Lens) was discussed at Twenty-Sixth Annual EMSA Meeting. A new commercially available Transmission Electron Microscope incorporating this new lens has been completed.Major advantages of the new instrument allow an extremely small beam to be produced on the specimen plane which minimizes specimen beam damages, reduces contamination and drift.

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