Non-lithographic Nanofabrication Using Porous Alumina Membranes

ABSTRACTWe describe a fabrication method to prepare highly ordered Si nanopore arrays. A nanoporous alumina template of thickness ∼1μm is prepared by means of anodization of an aluminum film. The template has a highly ordered hexagonal array of pores of diameter ∼50nm. The template is detached from the aluminum layer and placed on a Si substrate. The nanoporous pattern is transferred onto silicon substrate by means of a dry plasma etch process. This produces an array of nanopores in silicon with a diameter of ∼50nm and depth of ∼300nm. We have used such an array to prepare Fe nanopillars inside the pores by means of thermal evaporation. Magnetization versus applied magnetic field measurements for the Fe nanoarrays, demonstrate large perpendicular anisotropy typical of high aspect ratio magnetic nanopillars. The value of coercivity is about 500Oe in the perpendicular direction and 40Oe in the parallel direction.

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FABRICATION OF SELF-ORGANIZED METAL NANOWIRE ARRAY USING POROUS ALUMINA TEMPLATE FOR OFF-CHIP INTERCONNECTS

International Journal of Nanoscience ◽

10.1142/s0219581x06004620 ◽

2006 ◽

Vol 05 (04n05) ◽

pp. 453-458 ◽

Cited By ~ 3

Author(s):

S. BALAKRISHNAN ◽

V. KRIPESH ◽

SER CHOONG CHONG

Keyword(s):

Silicon Wafer ◽

Porous Alumina ◽

Nanowire Array ◽

Oxalic Acid Solution ◽

Aluminum Film ◽

Native Oxide ◽

Alumina Template ◽

Nanoporous Alumina ◽

Self Organized ◽

Nickel Nanowire

Porous anodic alumina formation on silicon substrate is an example of a nanostructured porous array that is well-suited as a template for growing metallic nanowires. Commercial silicon wafer deposited with aluminum is used as substrate. Prior to anodization, the aluminum film is cleaned with mixture of acids solution to remove its native oxide growth. Anodization of aluminum film on silicon wafer is performed in oxalic acid solution to generate uniform and self-organized nanoporous alumina film. The pores are in the range of 60 nm diameter and pore density is about 9 × 109/ cm 2. The nanoporous alumina template is filled with nickel nanowires by wet electrodeposition process. After nanowire is grown on silicon wafer, the alumina template is etched and the as grown nickel nanowire forest is patterned using laser pruning method. The crystallinity pattern of the as grown nickel naowire forest is characterized using X-ray diffraction technique.

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Investigation of helium charged beams passing through the porous alumina membranes

Journal of Physics Conference Series ◽

10.1088/1742-6596/929/1/012052 ◽

2017 ◽

Vol 929 ◽

pp. 012052

Author(s):

E N Muratova ◽

A A Shemukhin

Keyword(s):

Porous Alumina ◽

Alumina Membranes

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Fabrication of a gecko-like hierarchical fibril array using a bonded porous alumina template

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/17/10/n02 ◽

2007 ◽

Vol 17 (10) ◽

pp. N75-N81 ◽

Cited By ~ 57

Author(s):

Tanu Suryadi Kustandi ◽

Victor Donald Samper ◽

Wan Sing Ng ◽

Ai Shing Chong ◽

Han Gao

Keyword(s):

Porous Alumina ◽

Alumina Template ◽

Porous Alumina Template

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Structural and chemical modification of porous alumina membranes

Microporous and Mesoporous Materials ◽

10.1016/j.micromeso.2009.05.024 ◽

2009 ◽

Vol 126 (1-2) ◽

pp. 87-94 ◽

Cited By ~ 84

Author(s):

Leonora Velleman ◽

Gerry Triani ◽

Peter J. Evans ◽

Joe G. Shapter ◽

Dusan Losic

Keyword(s):

Chemical Modification ◽

Porous Alumina ◽

Alumina Membranes

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Investigation of transmission of 1.7-MeV He+ beams through porous alumina membranes

Technical Physics Letters ◽

10.1134/s1063785014030110 ◽

2014 ◽

Vol 40 (3) ◽

pp. 219-221 ◽

Cited By ~ 8

Author(s):

A. A. Shemukhin ◽

E. N. Muratova

Keyword(s):

Porous Alumina ◽

Alumina Membranes

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Separating Hydrogen From Coal Gasification Gases With Alumina Membranes

Volume 3: Coal, Biomass and Alternative Fuels; Combustion and Fuels; Oil and Gas Applications; Cycle Innovations ◽

10.1115/91-gt-132 ◽

1991 ◽

Cited By ~ 2

Author(s):

B. Z. Egan ◽

D. E. Fain ◽

G. E. Roettger ◽

D. E. White

Keyword(s):

Carbon Dioxide ◽

Coal Gasification ◽

Process Development ◽

Porous Alumina ◽

Mean Value ◽

Knudsen Flow ◽

Gasification Process ◽

Alumina Membranes ◽

Separation Factors ◽

Membrane Permeabilities

Synthesis gas produced in coal gasification processes contains hydrogen, along with carbon monoxide, carbon dioxide, hydrogen sulfide, water, nitrogen, and other gases, depending on the particular gasification process. Development of membrane technology to separate the hydrogen from the raw gas at the high operating temperatures and pressures near exit gas conditions would improve the efficiency of the process. Tubular porous alumina membranes with mean pore radii ranging from about 9 to 22 A have been fabricated and characterized. Based on the results of hydrostatic tests, the burst strength of the membranes ranged from 800 to 1600 psig, with a mean value of about 1300 psig. These membranes were evaluated for separating hydrogen and other gases. Tests of membrane permeabilities were made with helium, nitrogen, and carbon dioxide. Measurements were made at room temperature in the pressure range of 15 to 589 psi. In general, the relative gas permeabilities correlated qualitatively with a Knudsen flow mechanism; however, other gas transport mechanisms such as surface adsorption may also be involved. Efforts are under way to fabricate membranes having still smaller pores. At smaller pore sizes, higher separation factors are expected from molecular sieving effects.

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