FABRICATION OF SELF-ORGANIZED METAL NANOWIRE ARRAY USING POROUS ALUMINA TEMPLATE FOR OFF-CHIP INTERCONNECTS

Porous anodic alumina formation on silicon substrate is an example of a nanostructured porous array that is well-suited as a template for growing metallic nanowires. Commercial silicon wafer deposited with aluminum is used as substrate. Prior to anodization, the aluminum film is cleaned with mixture of acids solution to remove its native oxide growth. Anodization of aluminum film on silicon wafer is performed in oxalic acid solution to generate uniform and self-organized nanoporous alumina film. The pores are in the range of 60 nm diameter and pore density is about 9 × 109/ cm 2. The nanoporous alumina template is filled with nickel nanowires by wet electrodeposition process. After nanowire is grown on silicon wafer, the alumina template is etched and the as grown nickel nanowire forest is patterned using laser pruning method. The crystallinity pattern of the as grown nickel naowire forest is characterized using X-ray diffraction technique.