Ultrathin Insulator Films with Atomically Smooth Surfaces Using Plasma Processing
1970 ◽
Vol 28
◽
pp. 306-307
1989 ◽
Vol 47
◽
pp. 552-553
Keyword(s):
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
◽
2019 ◽
Vol 23
(1)
◽
pp. 25-36
Keyword(s):
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
◽
2016 ◽
Vol 20
(1)
◽
pp. 59-83
Keyword(s):