High Performance n- and p-channel Strained Single Grain Silicon TFTs using Excimer Laser

2009 ◽  
Vol 1153 ◽  
Author(s):  
Alessandro Baiano ◽  
Ryoichi Ishihara ◽  
Kees Beenakker

AbstractIn this paper we investigate the carriers mobility enhancement of the n- and p-channel single-grain silicon thin-film transistors (SG-TFTs) by μ-Czochralski process at low-temperature process (< 350 °C). The high laser energy density nearby the ablation phenomenon that completely melts the silicon layer during the crystallization is responsible for high tensile strain and good crystal quality of the silicon grains, which lead carriers mobility enhancement.

2002 ◽  
Vol 715 ◽  
Author(s):  
Sang-Hoon Jung ◽  
Jae-Hoon Lee ◽  
Min-Koo Han

AbstractA short channel polycrystalline silicon thin film transistor (poly-Si TFT), which has single grain boundary in the center of channel, is reported. The reported poly-Si TFT employs lateral grain growth method through aluminum patterns, which acts as a selective beam mask and a lateral heat sink during the laser irradiation, on an amorphous silicon layer. The electrical characteristics of the proposed poly-Si TFT have been considerably improved due to grain boundary density lowered. The reported short channel poly-Si TFT with single grain boundary exhibits high mobility as 222 cm2/Vsec and large on/off current ratio exceeding 1 × 108.


2010 ◽  
Author(s):  
John S. Lettow ◽  
Christy Martin

2006 ◽  
Vol 15 (04) ◽  
pp. 447-453
Author(s):  
SHIAN ZHANG ◽  
ZHENRONG SUN ◽  
LI DENG ◽  
ZUGENG WANG

Supercontinuum spectrum generation by femtosecond laser pulses propagating in transparent liquids with different band gap thresholds is investigated. As the laser energy increases, the laser spectrum is strongly broadened and modulated, and finally a supercontinuum spectrum can be observed. The spectral broadening can be mainly attributed to the optical Kerr effect at low laser energy and the plasma created by the multiphoton excitation of electrons from the valence band to the conduction band at high laser energy. It is found that the spectral broadening and modulation strongly depend on the band gap threshold E gap of the medium.


2013 ◽  
Vol 59 ◽  
pp. 17010
Author(s):  
E. d'Humières ◽  
R. Capdessus ◽  
V.T. Tikhonchuk

1993 ◽  
Vol 47 (10) ◽  
pp. 1659-1664 ◽  
Author(s):  
Mikio Kuzuya ◽  
Hitoshi Matsumoto ◽  
Hideaki Takechi ◽  
Osamu Mikami

The effects of laser energy and atmosphere on the emission characteristics of laser-induced plasmas were studied with the use of a Q-switched Nd: YAG laser over a laser energy range of 20 to 95 mJ. Argon, helium, and air were used as surrounding atmospheres, and the pressures were changed from atmospheric pressure to 1 Torr. The experimental results showed that the maximum spectral intensity was obtained in argon at around 200 Torr at a high laser energy of 95 mJ, whereas the line-to-background ratio was maximized in helium at around 40 Torr at a low energy of 20 mJ. The results are discussed briefly on the basis of the temporal and spatial observations of the laser-induced plasmas.


AIP Advances ◽  
2018 ◽  
Vol 8 (5) ◽  
pp. 056223
Author(s):  
M. Nakano ◽  
H. Kondo ◽  
A. Yamashita ◽  
T. Yanai ◽  
M. Itakura ◽  
...  

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