Comparative Study of MVHF and RF Deposited Large Area Multi-junction Solar Cells Incorporating Hydrogenated Nano-Crystalline Silicon
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AbstractWe report our investigations of large area multi-junction solar cells based on hydrogenated nano-crystalline silicon (nc-Si:H). We compared results from cells deposited by RF (13.56 MHz) at lower deposition rate (˜3 Å/s) and by Modified Very High Frequency (MVHF) at higher rate (≥ 10 Å/s). With optimized process conditions and cell structures, we have obtained ˜12% initial small active-area (˜0.25 cm2) efficiency for both RF and MVHF cells and 10˜11% large aperture-area (˜400 cm2) encapsulated MVHF cell efficiency for both a-Si:H/nc-Si:H double-junction and a-Si:H/nc-Si:H/nc-Si:H triple-junction structures on Ag/ZnO coated stainless steel substrate.
A novel low cost texturization method for large area commercial mono-crystalline silicon solar cells
2006 ◽
Vol 90
(20)
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pp. 3557-3567
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Low Cost
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2022 ◽
Vol 138
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pp. 106299
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2007 ◽
Vol 91
(20)
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pp. 1943-1947
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