Effects of Oxygen on Diamond Growth

1989 ◽  
Vol 162 ◽  
Author(s):  
Stephen J. Harris ◽  
Anita M. Weiner

ABSTRACTIn situ mass spectral measurements of the gas composition at the substrate surface were made during filament-assisted diamond growth. The input gases were various mixtures of CH4, O2, and H2 chosen in order to discern the effects of oxygen addition on diamond formation and growth. The gas phase chemistry was modeled as a 1-dimensional flow reactor, and the measured and calculated species mole fractions were in good agreement. The model was then used to estimate mole fractions of several atomic and radical species which could not be measured. We find that addition of O2 has only a small effect on the radical mole fractions. However, O2 can reduce the effective initial hydrocarbon mole fraction, which is important because higher quality diamond is grown at lower initial hydrocarbon mole fraction. Most importantly, perhaps, O2 addition leads to the formation of sufficient gas phase OH to remove non-diamond (pyrolytic) carbon from the film. Thus, O2 addition allows diamond films to be grown under composition and temperature conditions which otherwise would produce largely non-diamond carbon.

1989 ◽  
Vol 162 ◽  
Author(s):  
Pehr E. Pehrsson ◽  
H. H. Nelson ◽  
F. G. Celii

ABSTRACTWe investigated UV laser irradiation as a method to modify the surface and gas phase chemistry in a diamond growth apparatus. In particular, attempts were made to reproduce reported laser-enhanced deposition. The variables included the laser wavelength and intensity, the precursor gas (and hence the gas-phase absorption), the flow rate, and the gas inlet orientation with respect to the filament. The samples were analyzed using optical microscopy, Scanning Electron Microscopy, the Scanning Auger Microprobe, and micro-Raman scattering. In all cases, the laser radiation suppressed or had no effect on diamond deposition in comparison to the adjacent unirradiated regions. The crystals that did grow in the irradiated regions were similar in size and morphology to those from the unirradiated areas, suggesting ablation or nucleation site blockage as possible deposition suppression mechanisms. The results suggest a novel method for diamond film patterning.


1999 ◽  
Vol 606 ◽  
Author(s):  
Carmela C. Amato-Wierda ◽  
Edward T. Norton ◽  
Derk A. Wierda

AbstractTetrakis(dimethylamino)titanium (TDMAT) is an important precursor for TiN, TiCN, and TiSiN thin films in chemical vapor deposition. In order to better understand how the gas phase chemistry influences the formation of these films, the decomposition of TDMAT has been studied in a high-temperature flow reactor (HTFR) by molecular beam mass spectrometry (MBMS). Two kinetic regimes have been observed as a function of temperature. Rate expressions and mechanistic implications will be presented. Further studies are in progress to identify the gas phase species relevant to the decomposition mechanism of TDMAT.


2019 ◽  
Vol 12 (3) ◽  
pp. 1209-1225 ◽  
Author(s):  
Christoph A. Keller ◽  
Mat J. Evans

Abstract. Atmospheric chemistry models are a central tool to study the impact of chemical constituents on the environment, vegetation and human health. These models are numerically intense, and previous attempts to reduce the numerical cost of chemistry solvers have not delivered transformative change. We show here the potential of a machine learning (in this case random forest regression) replacement for the gas-phase chemistry in atmospheric chemistry transport models. Our training data consist of 1 month (July 2013) of output of chemical conditions together with the model physical state, produced from the GEOS-Chem chemistry model v10. From this data set we train random forest regression models to predict the concentration of each transported species after the integrator, based on the physical and chemical conditions before the integrator. The choice of prediction type has a strong impact on the skill of the regression model. We find best results from predicting the change in concentration for long-lived species and the absolute concentration for short-lived species. We also find improvements from a simple implementation of chemical families (NOx = NO + NO2). We then implement the trained random forest predictors back into GEOS-Chem to replace the numerical integrator. The machine-learning-driven GEOS-Chem model compares well to the standard simulation. For ozone (O3), errors from using the random forests (compared to the reference simulation) grow slowly and after 5 days the normalized mean bias (NMB), root mean square error (RMSE) and R2 are 4.2 %, 35 % and 0.9, respectively; after 30 days the errors increase to 13 %, 67 % and 0.75, respectively. The biases become largest in remote areas such as the tropical Pacific where errors in the chemistry can accumulate with little balancing influence from emissions or deposition. Over polluted regions the model error is less than 10 % and has significant fidelity in following the time series of the full model. Modelled NOx shows similar features, with the most significant errors occurring in remote locations far from recent emissions. For other species such as inorganic bromine species and short-lived nitrogen species, errors become large, with NMB, RMSE and R2 reaching >2100 % >400 % and <0.1, respectively. This proof-of-concept implementation takes 1.8 times more time than the direct integration of the differential equations, but optimization and software engineering should allow substantial increases in speed. We discuss potential improvements in the implementation, some of its advantages from both a software and hardware perspective, its limitations, and its applicability to operational air quality activities.


2009 ◽  
Vol 48 (3) ◽  
pp. 1391-1399 ◽  
Author(s):  
R. Lanza ◽  
D. Dalle Nogare ◽  
P. Canu

ChemInform ◽  
2007 ◽  
Vol 38 (30) ◽  
Author(s):  
Marcos N. Eberlin ◽  
Daniella Vasconcellos Augusti ◽  
Rodinei Augusti

Author(s):  
Ahmed Al Shoaibi ◽  
Anthony M. Dean

Pyrolysis experiments of isobutane, isobutylene, and 1-butene were performed over a temperature range of 550–750°C and a pressure of ∼0.8 atm. The residence time was ∼5 s. The fuel conversion and product selectivity were analyzed at these temperatures. The pyrolysis experiments were performed to simulate the gas-phase chemistry that occurs in the anode channel of a solid-oxide fuel cell (SOFC). The experimental results confirm that molecular structure has a substantial impact on pyrolysis kinetics. The experimental data show considerable amounts of C5 and higher species (∼2.8 mole % with isobutane at 750°C, ∼7.5 mole % with isobutylene at 737.5°C, and ∼7.4 mole % with 1-butene at 700°C). The C5+ species are likely deposit precursors. The results confirm that hydrocarbon gas-phase kinetics have substantial impact on a SOFC operation.


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