High Resolution Etching of Gaas and Cds Crystals
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ABSTRACTSubmicrometer gratings have been etched in GaAs and CdS crystals which have been immersed in an oxidizing etch and illuminated with interferring laser beams. A resolution of 170 nm was obtained. At high laser intensity and with prolonged etching time the surface properties of the material are degraded. The use of in-situ optical measurements of grating parameters allows ready optimization of the grating fabrication process.
2014 ◽
Vol 644-650
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pp. 1433-1437
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2018 ◽
Vol 5
(1)
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pp. 153-161
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1976 ◽
Vol 36
(16)
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pp. 949-952
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