Ferroelectric Thin Films Deposited by Laser Ablation

1990 ◽  
Vol 200 ◽  
Author(s):  
K. Ramkumar ◽  
J. Lee ◽  
A. Safari ◽  
S.C. Danforth

ABSTRACTThe deposition of thin films of ferroelectric materials by the laser ablation technique was investigated. The films were grown by ablation from a bulk target of lead zirconate titanate (PZT) exposed to laser pulses from CO2 amd KrF excimer lasers. The effects of deposition and annealing conditions on the structure and stoichiometry of the films were studied.

1990 ◽  
Vol 200 ◽  
Author(s):  
C. K. Chiang ◽  
L. P. Cook ◽  
P. K. Schenck ◽  
P. S. Brody ◽  
J. M. Benedetto

ABSTRACTLead zirconate-titanate (PZT) thin films were prepared by the laser ablation technique. The PZT (Zr/Ti=53/47) target was irradiated using a focused q-switched Nd:YAG laser (15 ns, 100 mJ at 1.064 μ;m). The as-deposited films were amorphous as indicated by X-ray powder patterns, but crystallized readily with brief annealing above 650°C. The dielectric constant and the resistivity of the crystallized films were studied using a parallel-plate type capacitor structure.


1999 ◽  
Vol 14 (3) ◽  
pp. 940-947 ◽  
Author(s):  
Sucharita Madhukar ◽  
S. Aggarwal ◽  
A. M. Dhote ◽  
R. Ramesh ◽  
S. B. Samavedam ◽  
...  

We report on the feasibility of using molybdenum silicide as a conducting barrier for integration of ferroelectric lead zirconate titanate capacitors on Si. Thin films of MoSi2 were deposited by pulsed laser-ablation deposition (PLD). The silicide films showed a structural transition from amorphous to orthorhombic to tetragonal phase as the temperature of deposition was changed from room temperature to 900 °C. The four-probe resistivity and surface roughness of the films decreased with an increase in the deposition temperature and crystallinity of the phase. Ferroelectric (La, Sr)CoO3/Pb(Nb, Zr, Ti)O3/(La, Sr)CoO3 capacitors were grown on Si/poly Si/MoSi2, and Si/poly Si/MoSi2/Pt structures. Transmission electron microscopy (TEM) studies of the MoSi2/LSCO and MoSi2/Pt/LSCO heterostructures indicated the formation of a thin layer of SiO2. In the case of Pt/MoSi2, Pt reacts with the silicide and forms PtSi, consuming the entire platinum layer and, thus, makes it unsuitable as a composite barrier. Electrical testing of the LSCO/PNZT/LSCO capacitors through capacitive coupling showed desirable ferroelectric properties on these substrates.


2019 ◽  
Vol 2019 ◽  
pp. 1-11 ◽  
Author(s):  
A. K. Kodeary ◽  
S. M. Hamidi

We report an experimental study on the piezophotonic effect of gold and lead zirconate titanate (PbZrTiO3) nanoparticles (NPs) and also their core-shell nanostructures prepared by the laser ablation in liquid method. To obtain these NPs and composite materials, the targets were immersed in deionized water and a polymeric solution of polyvinyl pyrrolidone (PVP) under Nd:YAG laser pulses irradiation. Linear and nonlinear properties of these NPs were studied by optical spectroscopy and the Z-scan technique. Furthermore, tunable nonlinear properties of the NPs were measured under an external electric field under illumination to investigate the piezophotonic effect. Our results show that, at the interface of PZT and Au, due to the Schottky barrier, we have electron/hole recombination prevention, which leads to efficient enhancement in the nonlinear properties.


1991 ◽  
Vol 30 (Part 1, No. 9B) ◽  
pp. 2167-2169 ◽  
Author(s):  
Hideo Kidoh ◽  
Toshio Ogawa ◽  
Hideyuki Yashima ◽  
Akiharu Morimoto ◽  
Tatsuo Shimizu

Sign in / Sign up

Export Citation Format

Share Document