Lead Zirconate-Titanate Thin Films Prepared by the Laser Ablation Technique
Keyword(s):
X Ray
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ABSTRACTLead zirconate-titanate (PZT) thin films were prepared by the laser ablation technique. The PZT (Zr/Ti=53/47) target was irradiated using a focused q-switched Nd:YAG laser (15 ns, 100 mJ at 1.064 μ;m). The as-deposited films were amorphous as indicated by X-ray powder patterns, but crystallized readily with brief annealing above 650°C. The dielectric constant and the resistivity of the crystallized films were studied using a parallel-plate type capacitor structure.
2000 ◽
Vol 39
(Part 1, No. 9B)
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pp. 5413-5417
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1991 ◽
Vol 30
(Part 1, No. 9B)
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pp. 2167-2169
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1996 ◽
Vol 96-98
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pp. 769-774
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