Intrinsic Gettering of Iron in Czochralski Silicon Crystals

ABSTRACTWe present a new experimental approach to studying the mechanism of intrinsic gettering of Fe in Czochralski silicon crystals. We present our experimental method and results for as-grown and intrinsic gettered wafers with high and low-level Fe surface contamination. We found that when annealing at the Fe supersaturation temperature, Fe concentration decreases faster in intrinsic gettered wafers than in as-grown wafers. Concentration saturated with annealing time for each sample and the saturated Fe concentration followed a simple Arrhenius relationship. Re-emission of Fe from the bulk defect region occurred above the gettering temperature. We conclude that in intrinsic gettering, Fe precipitates preferentially in the bulk defect region when the Fe impurities supersaturate as temperature drops.

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Effect of Fe Impurities on the Generation of Process-Induced Microdefects in Czochralski Silicon Crystals

Japanese Journal of Applied Physics ◽

10.1143/jjap.35.520 ◽

1996 ◽

Vol 35 (Part 1, No. 2A) ◽

pp. 520-525 ◽

Cited By ~ 3

Author(s):

Jaroslaw Jablonski ◽

Mina Saito ◽

Yoshiji Miyamura ◽

Masato Imai

Keyword(s):

Czochralski Silicon ◽

Silicon Crystals ◽

Fe Impurities

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Oxygen Precipitation in Conventional and Nitrogen Co-Doped Heavily Arsenic-Doped Czochralski Silicon Crystals: Oswald Ripening

Solid State Phenomena ◽

10.4028/www.scientific.net/ssp.156-158.275 ◽

2009 ◽

Vol 156-158 ◽

pp. 275-278

Author(s):

Xiang Yang Ma ◽

Yan Feng ◽

Yu Heng Zeng ◽

De Ren Yang

Keyword(s):

High Temperature ◽

Low Temperature ◽

Czochralski Silicon ◽

Silicon Crystals ◽

Oxygen Precipitation ◽

High Temperature Anneal ◽

Oxygen Precipitates ◽

Co Doped ◽

Oswald Ripening

Oxygen precipitation (OP) behaviors in conventional and nitrogen co-doped heavily arsenic-doped Czocharalski silicon crystals subjected to low-high two-step anneals of 650 oC/8 h + 1000 oC/4-256 h have been comparatively investigated. Due to the nitrogen enhanced nucleation of OP during the low temperature anneal, much higher density of oxygen precipitates generated in the nitrogen co-doped specimens. With the extension of high temperature anneal, Oswald ripening of OP in the nitrogen co-doped specimens preceded that in the conventional ones. Moreover, due to the Oswald ripening effect, the oxygen precipitates in the conventional specimens became larger with a wider range of sizes. While, the sizes of oxygen precipitates in the nitrogen co-doped specimens distributed in a much narrower range with respect to the conventional ones.

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Oxygen‐induced recombination centers in as‐grown Czochralski silicon crystals

Applied Physics Letters ◽

10.1063/1.94312 ◽

1983 ◽

Vol 43 (3) ◽

pp. 241-243 ◽

Cited By ~ 23

Author(s):

K. Nauka ◽

H. C. Gatos ◽

J. Lagowski

Keyword(s):

Czochralski Silicon ◽

Silicon Crystals ◽

Recombination Centers

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Enhancement of oxygen precipitation in quenched Czochralski silicon crystals

Journal of Applied Physics ◽

10.1063/1.344030 ◽

1989 ◽

Vol 66 (8) ◽

pp. 3958-3960 ◽

Cited By ~ 12

Author(s):

Akito Hara ◽

Tetsuo Fukuda ◽

Toru Miyabo ◽

Iesada Hirai

Keyword(s):

Czochralski Silicon ◽

Silicon Crystals ◽

Oxygen Precipitation

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Morphology and size distribution of oxide precipitates in as‐grown Czochralski silicon crystals

Applied Physics Letters ◽

10.1063/1.112886 ◽

1994 ◽

Vol 65 (13) ◽

pp. 1686-1688 ◽

Cited By ~ 21

Author(s):

K. Sueoka ◽

N. Ikeda ◽

T. Yamamoto

Keyword(s):

Size Distribution ◽

Czochralski Silicon ◽

Silicon Crystals

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How can experiments play a greater role in public policy? Twelve proposals from an economic model of scaling

Behavioural Public Policy ◽

10.1017/bpp.2020.17 ◽

2020 ◽

Vol 5 (1) ◽

pp. 2-49 ◽

Cited By ~ 1

Author(s):

OMAR AL-UBAYDLI ◽

MIN SOK LEE ◽

JOHN A. LIST ◽

CLAIRE L. MACKEVICIUS ◽

DANA SUSKIND

Keyword(s):

Public Policy ◽

Experimental Method ◽

Economic Model ◽

Large Scale ◽

Experimental Approach ◽

Scale Up ◽

Original Research ◽

Economic Framework ◽

Scientific Experiments ◽

Research Findings

AbstractPolicymakers are increasingly turning to insights gained from the experimental method as a means to inform large-scale public policies. Critics view this increased usage as premature, pointing to the fact that many experimentally tested programs fail to deliver their promise at scale. Under this view, the experimental approach drives too much public policy. Yet, if policymakers could be more confident that the original research findings would be delivered at scale, even the staunchest critics would carve out a larger role for experiments to inform policy. Leveraging the economic framework of Al-Ubaydli et al. (2019), we put forward 12 simple proposals, spanning researchers, policymakers, funders and stakeholders, which together tackle the most vexing scalability threats. The framework highlights that only after we deepen our understanding of the scale-up problem will we be on solid ground to argue that scientific experiments should hold a more prominent place in the policymaker's quiver.

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