Barrier Effect of Retrograde Well Against Ion-Induced-Charge Carriers
Keyword(s):
Ion Beam
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ABSTRACTThe charge collection efficiency of a diode with a retrograde well was estimated using focused ion beam irradiation at 400 keV and 2 MeV. The retrograde well was found to effectively suppress a collection of charge carriers created by energetic particles. The charge collection efficiency of the diode with the retrograde well was ~ 25 % lower than that with the conventional well when 400 keV ~ 2 MeV protons were irradiated normal to diodes. This result was in good agreement with device simulation.
2000 ◽
Vol 53
(1-4)
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pp. 191-194
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