Depth Profiling of Molybdenum Thin Films Using Grazing Incidence X-Ray Scattering

ABSTRACTIt is important that inherent strains (or stresses) be controlled during thin film processing. This study used grazing incidence x-ray scattering (G1XS) to determine the strain gradient present in a ∼1700 Å sputtered molybdenum thin film. In particular, the gradient in the hydrostatic strain was Measured. This observation corresponded to assessing the average change in the lattice parameter as a function of depth throughout the thickness of the film. In addition, the strain ellipsoids, which represent the state of strain in three dimensions, were calculated as a function of film depth. It was shown that the strain varied throughout the ∼1700 Å Mo film thickness and that the principal strains were anisotropic, with one principal strain much larger than the others in Magnitude.

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Grazing-incidence X-ray scattering of lamellar thin films

Journal of Applied Crystallography ◽

10.1107/s1600576719000402 ◽

2019 ◽

Vol 52 (2) ◽

pp. 247-251

Author(s):

Detlef-M. Smilgies

Keyword(s):

Thin Film ◽

Thin Films ◽

Small Molecules ◽

Film Studies ◽

Grazing Incidence ◽

Semicrystalline Polymers ◽

X Ray ◽

X Ray Scattering ◽

Incident Plane ◽

Ray Scattering

Recently, surface and thin-film studies using area detectors have become prevalent. An important class of such systems are lamellar thin films formed by small molecules, liquid crystals or semicrystalline polymers. Frequently, the lamellae align more or less parallel to the substrate. Such structures can be easily discerned by their characteristic X-ray scattering close to the incident plane. This paper describes how such patterns can be simulated, in order to extract morphological information about the thin film.

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Characterization of Lipid-Templated Silica and Hybrid Thin Film Mesophases by Grazing Incidence Small-Angle X-ray Scattering

Langmuir ◽

10.1021/la900748r ◽

2009 ◽

Vol 25 (16) ◽

pp. 9500-9509 ◽

Cited By ~ 17

Author(s):

Darren R. Dunphy ◽

Todd M. Alam ◽

Michael P. Tate ◽

Hugh W. Hillhouse ◽

Bernd Smarsly ◽

...

Keyword(s):

Thin Film ◽

Small Angle ◽

Grazing Incidence ◽

Hybrid Thin Film ◽

X Ray ◽

X Ray Scattering ◽

Ray Scattering

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Thin film island growth kinetics: a grazing incidence small angle X-ray scattering study of gold on glass

Surface Science ◽

10.1016/0039-6028(91)90075-4 ◽

1991 ◽

Vol 248 (1-2) ◽

pp. 215-224 ◽

Cited By ~ 67

Author(s):

Joanne R. Levine ◽

J.B. Cohen ◽

Y.W. Chung

Keyword(s):

Thin Film ◽

Growth Kinetics ◽

Small Angle ◽

Grazing Incidence ◽

Island Growth ◽

X Ray ◽

X Ray Scattering ◽

Scattering Study ◽

Ray Scattering

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In-situ X-ray Measurements of the Initial Epitaxy of Fe(001) Films on MgO(001)

MRS Proceedings ◽

10.1557/proc-280-441 ◽

1992 ◽

Vol 280 ◽

Author(s):

Bruce M. Lairson ◽

A. P. Payne ◽

S. Brennan ◽

N. M. Rensing ◽

B. J. Daniels ◽

...

Keyword(s):

Elasticity Theory ◽

Grazing Incidence ◽

Lattice Parameter ◽

X Ray ◽

X Ray Scattering ◽

Monolayer Coverage ◽

Continuum Elasticity ◽

Ray Scattering

ABSTRACTWe have studied die evolution of the lattice parameter of epitaxial Fe(001) on MgO(001) vs. thickness between 1 and 200 monolayers using Grazing Incidence X-ray Scattering. We show that an interaction exists between the islanded film and the substrate, which allows the film to be incommensurate, even when the islands are too small to allow full dislocations to exist. For the conditions studied, the Fe lattice parameter increases toward the MgO lattice parameter with increasing thickness in the 1–10 monolayer coverage regime, and then relaxes back toward the bulk Fe lattice parameter at greater thicknesses. We employ a model for the interaction between film islands and the substrate which explains large changes in the lattice parameter of the Fe in the 1–10 monolayer thickness range. Relaxation at larger thicknesses is described by continuum elasticity theory.

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Principal Residual Strains as A function of Depth for Sputter Deposited Mo Thin Films

MRS Proceedings ◽

10.1557/proc-356-603 ◽

1994 ◽

Vol 356 ◽

Author(s):

S. G. Malhotra ◽

Z. U. Rek ◽

L. J. Parfitt ◽

S. M. Yalisove ◽

J. C. Bilello

Keyword(s):

Thin Film ◽

Thin Films ◽

Grazing Incidence ◽

X Ray ◽

X Ray Scattering ◽

Out Of Plane ◽

Residual Strains ◽

Sputter Deposited ◽

Film Substrate ◽

Principal Strains

AbstractTraditionally, the magnitude of the stress in a thin film is obtained by measuring the curvature of the film-substrate couple; however, these techniques all measure the average stress throughout the film thickness. On a microscopic level, the details of the strain distribution as a function of depth through the thickness of the film can have important consequences in governing film quality and ultimate morphology. A new method for determining the magnitude of principal strains (strain eigenvalues) as a function of x-ray penetration depth using grazing incidence x-ray scattering for a polycrystalline thin film will be described. Results are reported for two Mo metallizations ˜ 500 Å and ˜1000 Å thick sputtered onto Si {100} substrates. The magnitude of the principal strains at several penetration depths was accomplished by an analysis of the diffraction peak shifts of at least six independent {hkl} scattering vectors from the Mo thin films. An out-of-plane strain gradient was identified in both Mo films and the strain eigenvalues were found to be anisotropic in nature. This new methodology should work with a variety of thin films and hence would provide quantitative insight into the evolution of thin film microstructure.

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