Development of Anisotropic GaAs (001) Surface Morphology During Molecular Beam Epitaxial Growth
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ABSTRACTWe have studied the development of a microscopically ridged [110] Morphology during (001) GaAs Molecular beam epitaxy, as a function of layer thickness and growth temperature. The ridge slopes are consistent with the [110] separation required to incorporate a majority of adatoms by step-flow growth. Thus step-flow can be a dominant growth mode even on nominally on-axis (singular) substrates. With increasing epilayer thickness, the ridge slopes, and surface step density, remain approximately constant, while the ridge spacings, and therefore roughness amplitude, increase steadily.
2016 ◽
Vol 213
(9)
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pp. 2498-2502
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2006 ◽
Vol 45
(No. 28)
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pp. L730-L733
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