scholarly journals Significance of Microstructure for a MOCVD-Grown YSZ Thin Film Gas Sensor

1995 ◽  
Vol 403 ◽  
Author(s):  
J. Vetrone ◽  
C. Foster ◽  
G. Bai
Keyword(s):  
Thin Film ◽  
Gas Sensor ◽  
Gas Sensing ◽  
Growth Conditions ◽  
Leakage Currents ◽  
Film Sensor ◽  
Low Leakage ◽  
Ion Conductivities ◽  
Gas Sensing Properties

AbstractWe report the fabrication and characterization of a low temperature (200°C-400°C) thin film gas sensor constructed from a MOCVD-grown yttria-stabilized zirconia (YSZ) layer sandwiched between two platinum thin film electrodes. A reproducible gas-sensing response is produced by applying a cyclic voltage which generates voltammograms with gas-specific current peaks and shapes. Growth conditions are optimized for preparing YSZ films having dense microstructures, low leakage currents, and maximum ion conductivities. In particular, the effect of growth temperature on film morphology and texture is discussed and related to the electrical and gas-sensing properties of the thin film sensor device.

Gas‐Sensing Properties of Th / SnO2 Thin‐Film Gas Sensor to Trimethylamine

1999 ◽  
Vol 146 (9) ◽  
pp. 3536-3537 ◽  
Author(s):  
P. H. Wei ◽  
G. B. Li ◽  
S. Y. Zhao ◽  
L. R. Chen
Keyword(s):  
Thin Film ◽  
Gas Sensor ◽  
Gas Sensing ◽  
Sno2 Thin Film ◽  
Sensing Properties ◽  
Gas Sensing Properties

Hydrothermal synthesis, characterization of h-WO3 nanowires and gas sensing of thin film sensor based on this powder

2015 ◽  
Vol 584 ◽  
pp. 294-299 ◽  
Author(s):  
Wen Zeng ◽  
Bin Miao ◽  
Tengfei Li ◽  
He Zhang ◽  
Shahid Hussain ◽  
...  
Keyword(s):  
Thin Film ◽  
Hydrothermal Synthesis ◽  
Gas Sensing ◽  
Film Sensor ◽  
Thin Film Sensor

Preparation and Characterization of SnO2 Thin Film Gas Sensor for NOx Gas for Environmental Monitoring

2007 ◽  
Vol 124-126 ◽  
pp. 223-226 ◽  
Author(s):  
Md. Mosharaf Hossain Bhuiyan ◽  
Tsuyoshi Ueda ◽  
Tomoaki Ikegami
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Gas Sensing ◽  
Sno2 Thin Film ◽  
Interdigitated Electrodes ◽  
Undoped Sno2 ◽  
Gas Sensing Properties ◽  
Sno2 Thin Films ◽  
Oxygen Gas

SnO2 thin films have been grown on Si3N4 substrates and also on Al2O3 sensor substrates with Pt interdigitated electrodes by the pulsed excimer laser deposition (PLD). Palladium doped SnO2 thin film was also prepared by the PLD method combined with the DC sputtering process. The substrate temperature and the oxygen gas pressure were changed from 300 to 500°C and from 100 to 300 mTorr, respectively during deposition. The morphology and structural properties of the prepared thin films have been studied by AFM and XRD. The gas sensing properties of the SnO2 sensor to NO gas was evaluated by measuring electrical resistance between interdigitated electrodes. The highest sensitivity of the undoped SnO2 and Pd doped sensor was found to be around 9.5 and 42, respectively.

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