The Relationship Between Micropipes and Screw Dislocations in Pvt Grown 6H-Sic
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AbstractThe growth surface of a 6H-SiC boule, grown by physical vapor transport, was examined using scanning force microscopy. The dimensions of surface/micropipe intersections and screw dislocation Burgers vectors have been determined from topographic data. All micropipes are positioned along the lines of super screw dislocations with a Burgers vectors of at least 4 times the c-axis repeat distance (15.2 Å). Perfect c-axis screw dislocations with Burgers vectors of only 15.2 Å are stable and do not have open cores. Measurements show that micropipe core radii, determined indirectly from the width of the craters formed at the surface/micropipe intersections, increase with the square of the dislocation Burgers vector.
1993 ◽
Vol 51
◽
pp. 532-533
1993 ◽
Vol 51
◽
pp. 224-225
1999 ◽
Vol 38
(5-6)
◽
pp. 491-503
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1998 ◽
Vol 58
(3-4)
◽
pp. 559-570
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