Quantifying Field-Induced Contrast Effects in Photoelectron Emission Microscopy

ABSTRACTSamples consisting of electrically isolated titanium lines fabricated on a titanium surface were used to quantify voltage-induced contrast effects in photoelectron emission microscopy (PEEM). Induced contrast effects were observed to extend 6 μm for a -5 V bias applied to a 303 nm tall raised line. We therefore explored, via numerical calculation, the spatial extent of the perturbation to the PEEM accelerating field caused by the bias applied across the step height. The intensity full width at half minimum agreed well with the calculated width defined by the 10% level of lateral field strength. For a line 550 nm tall, a correspondence was found for a calculated width defined by a 5% lateral field strength. It was observed that neighboring structures a few μm away affected the image contrast, for sufficiently strong applied bias. This suggests that effects can easily be induced at distances of 0.5 μm for modest applied voltages, as has been previously observed for structures buried under oxide layers 0.5 μm thick [1].