High-cycle fatigue of micromachined single crystal silicon measured using a parallel fatigue test system

IEICE Electronics Express ◽

10.1587/elex.4.288 ◽

2007 ◽

Vol 4 (9) ◽

pp. 288-293 ◽

Author(s):

Tsuyoshi Ikehara ◽

Toshiyuki Tsuchiya

Keyword(s):

Single Crystal ◽

Fatigue Test ◽

High Cycle Fatigue ◽

Single Crystal Silicon ◽

Test System ◽

Cycle Fatigue ◽

Crystal Silicon

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High-Cycle Fatigue Tests of Micro/Nano-Scale Single Crystal Silicon for Reliable Design of MEMS/NEMS

The proceedings of the JSME annual meeting ◽

10.1299/jsmemecjo.2004.1.0_369 ◽

2004 ◽

Vol 2004.1 (0) ◽

pp. 369-370

Author(s):

Takahiro NAMAZU ◽

Yoshitada ISONO

Keyword(s):

Single Crystal ◽

High Cycle Fatigue ◽

Single Crystal Silicon ◽

Fatigue Tests ◽

Cycle Fatigue ◽

Crystal Silicon ◽

Reliable Design

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High-cycle fatigue damage evaluation for micro-nanoscale single crystal silicon under bending and tensile stressing

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290544 ◽

2004 ◽

Author(s):

T. Namazu ◽

Y. Isono

Keyword(s):

Single Crystal ◽

Fatigue Damage ◽

High Cycle Fatigue ◽

Single Crystal Silicon ◽

Damage Evaluation ◽

Cycle Fatigue ◽

Crystal Silicon

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High-cycle fatigue of single-crystal silicon thin films

Journal of Microelectromechanical Systems ◽

10.1109/84.967383 ◽

2001 ◽

Vol 10 (4) ◽

pp. 593-600 ◽

Author(s):

C.L. Muhlstein ◽

S.B. Brown ◽

R.O. Ritchie

Keyword(s):

Single Crystal ◽

High Cycle Fatigue ◽

Single Crystal Silicon ◽

Cycle Fatigue ◽

Crystal Silicon ◽

Silicon Thin Films

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High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned specimens

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/18/7/075004 ◽

2008 ◽

Vol 18 (7) ◽

pp. 075004 ◽

Author(s):

T Ikehara ◽

T Tsuchiya

Keyword(s):

High Resolution ◽

Single Crystal ◽

High Cycle Fatigue ◽

Single Crystal Silicon ◽

Cycle Fatigue ◽

Crystal Silicon

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Errata to "High-cycle fatigue of single-crystal silicon thin films"

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2002.982868 ◽

2002 ◽

Vol 11 (1) ◽

pp. 91-91

Author(s):

C.L. Muhlstein ◽

S.B. Brown ◽

R.O. Ritchie

Keyword(s):

Single Crystal ◽

High Cycle Fatigue ◽

Single Crystal Silicon ◽

Cycle Fatigue ◽

Crystal Silicon ◽

Silicon Thin Films

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Micro tensile-test system fabricated on a single crystal silicon chip

Proceedings of Ninth International Workshop on Micro Electromechanical Systems ◽

10.1109/memsys.1996.494008 ◽

2002 ◽

Author(s):

K. Sato ◽

M. Shikida ◽

M. Yamasaki ◽

T. Yoshioka

Keyword(s):

Tensile Test ◽

Single Crystal ◽

Single Crystal Silicon ◽

Test System ◽

Crystal Silicon

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Low cycle fatigue of single crystal silicon thin films

Sensors and Actuators A Physical ◽

10.1016/j.sna.2007.06.029 ◽

2007 ◽

Vol 140 (2) ◽

pp. 257-265 ◽

Author(s):

Hsien-Kuang Liu ◽

B.J. Lee ◽

Pang-Ping Liu

Keyword(s):

Single Crystal ◽

Low Cycle Fatigue ◽

Single Crystal Silicon ◽

Cycle Fatigue ◽

Crystal Silicon ◽

Silicon Thin Films

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1000Hz Ultra High Cycle Fatigue Test System & High Speed Material Test System

The Proceedings of the Materials and processing conference ◽

10.1299/jsmemp.2000.8.19 ◽

2000 ◽

Vol 2000.8 (0) ◽

pp. 19-22

Author(s):

Keiichi FURUYA ◽

Rongsheng YIN ◽

Susumu TAKADA

Keyword(s):

Fatigue Test ◽

High Cycle Fatigue ◽

Test System ◽

Cycle Fatigue ◽

Material Test ◽

Ultra High Cycle Fatigue ◽

Material Test System

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Loading frequency improvement in fatigue test of single crystal silicon using parallel tensile testing device

The Proceedings of Mechanical Engineering Congress Japan ◽

10.1299/jsmemecj.2019.j22309p ◽

2019 ◽

Vol 2019 (0) ◽

pp. J22309P

Author(s):

Yuki YAMAZAKI ◽

Yoshikazu HIRAI ◽

Toshiyuki TSUCHIYA ◽

Osamu TABATA

Keyword(s):

Single Crystal ◽

Fatigue Test ◽

Tensile Testing ◽

Single Crystal Silicon ◽

Loading Frequency ◽

Testing Device ◽

Crystal Silicon

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Low-Cycle to Ultrahigh-Cycle Fatigue Lifetime Measurement of Single-Crystal-Silicon Specimens Using a Microresonator Test Device

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2012.2194771 ◽

2012 ◽

Vol 21 (4) ◽

pp. 830-839 ◽

Author(s):

Tsuyoshi Ikehara ◽

Toshiyuki Tsuchiya

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Lifetime Measurement ◽

Cycle Fatigue ◽

Test Device ◽

Crystal Silicon ◽

Fatigue Lifetime

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