Glow discharge plasma with an extended hollow cathode
Keyword(s):
A low-voltage low-pressure glow discharge with a hollow cathode is considered. The discharge is ignited in a reflective discharge system with two symmetrical peripheral discharge chambers, with a common extended hollow cathode at forevacuum. Plasma parameters were determined, admissible diameter of the plasma column in a hollow cathode. It is shown that there is no electric double layer in the region of the output aperture of the cathode cavity.
Modification of the electrode surface in glow discharge plasma with a hollow cathode